Flowmeters and Controllers for pure water/chemical equipment

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Wide lineup of flow meters and flow controllers suitable for integration into semiconductor manufacturing equipment, chemical solution systems, ultrapure water systems and more.

Ultrasonic Flowmeter

Ultrasonic flow meters made of fluororesin that can measure small liquid flow rates of ultrapure water and various chemicals without moving parts and with no contact between the sensor and the liquid.
With a diverse lineup, you can choose according to your application.

・Clamp-on type
・High precision type
・Flow Monitors
・Micro flow type
・High temperature type

Vortex Flow Sensor
Flow sensors that measure flow rate by detecting the number of vortices (Kármán vortices) generated downstream of a vortex generator placed in the flow path.
Available two types, fluororesin models and PPS resin models.

Flow Controller
Flow controllers with fluororesin wetted parts capable of controlling small to micro flow rates of pure water, ultrapure water, various chemical solutions, etc.
The lineup includes an all-in-one integrated type and a separate type with high installation flexibility.

Ultrasonic Flowmeter for built-in use｜Clamp-on type

Guides wave type Clamp-on Ultrasonic Flowmeter

GST/SFC011GS

GST/SFC011GS is a clamp-on ultrasonic flowmeter for small diameter PFA tube. There is no need for additional piping work because flow rate can be measured just by clamping onto the existing tube. The piping is virtually kept clean.
Most suitable for processes requiring cleanliness such as semiconductor manufacturing equipment, etc.
The compact design detector can be installed in equipment in a space-saving manner. The converter is a multi-channel type, and up to 6 detectors can be connected to one converter.

Product spec
Fluid to be measured Pure water,
Photoresist,
Low-K materials,
Thinner		 Measuring range Max. 0 to 2.0 L/min
Min. 0 to 0.5 L/min
Fluid temperature Normal temperature (Temperature change ±0.5 °C) Applicable tube size PFA
1/8”, 1/4”,
4 mm, 5 mm, 6 mm
Fluid pressure 0.5 MPa max. Accuracy ±2 % R.D
(> 0.8 L/min)
Power Supply DC 24 V ±10 % Converter mounting DIN rail

Clamp-on type Ultrasonic Flowmeter

UCL/SFC010C(1ch), SFC011C(6ch)

Clamp-on ultrasonic flowmeter for PFA tubing.
Applicable to tube sizes from small diameter to 1". No tube cutting or installation is required to install the flowmeter, and flow can be measured simply by clamping onto existing tubing.
Most suitable for processes requiring high cleanliness, such as semiconductor manufacturing equipment.
The lineup includes 1-channel and multi-channel converters, and up to 6 detectors can be connected to one converter.

Product spec
Fluid to be measured Liquids in general Measuring range Max. 0 to 80 L/min
Min. 0 to 3 L/min
Fluid temperature 10 to 60℃ Applicable tube size PFA
6 mm, 8 mm, 10 mm,
6.35 mm, 9.53 mm,
12.70 mm, 19.05 mm,
25.40 mm
Fluid pressure 0.5 MPa max. Accuracy ±2 % R.D
(> 0.8 L/min)
Power Supply DC 24 V ±10 % Converter mounting DIN rail

Ultrasonic Flowmeter for built-in use｜Flow Monitors

PFA Integrated Ultrasonic Flowmeter

UF

UF is a straight PFA tube type ultrasonic flowmeter with integrated converter and display.
It is suitable for a wide range of applications for ultrapure water, pure water, and water flow management.

Product spec
Fluid to be measured Ultrapure water,
pure water, water		 Measuring range Max. 0 to 150 L/min
Min. 0 to 20 L/min
Fluid temperature 10 to 90 ℃ Size 1/2", 3/4", 1"
Fluid pressure 0.5 MPa max. Accuracy ±2 % F.S.
Power Supply DC 24 V ±10 %

Compact Ultrasonic Flow Monitor

UCF006

Compact PFA ultrasonic flow monitor for water.
The straight structure of the flow measurement section eliminates air bubble accumulation in the fluid, and there is almost no pressure loss.
Suitable for measuring water flow rate in semiconductor manufacturing equipment, etc., where high cleanliness is required.

Product spec
Fluid to be measured Pure water, water Measuring range 0 to 8 L/min
Fluid temperature 10 to 80°C Size 6 mm
Fluid pressure 0.5 MPa max. Accuracy ±2 % R.D
(> 1.7 L/min)
Power Supply DC 24 V ±10 %

Ultrasonic Flowmeter with Bar Graph Display

UCM-04A/06A

PFA ultrasonic flow monitor with bar graph display for stable measurement of flow rates of pure water, various chemical solutions, etc.
The detector and converter are integrated into a compact, space-saving unit, and the flow rate is displayed by a 7-segment LED and bar graph on the front panel, allowing the flow rate to be checked on site.

Product spec
Fluid to be measured Liquids general
(Without bubbles)		 Measuring range Max. 0 to 8.0 L/min
Min. 0 to 0.2 L/min
Fluid temperature 10 to 60 ℃ Size UCM-04A：4 mm
UCM-06A：6 mm
Fluid pressure 0.4 MPa max. Accuracy ±1 % F.S.
Power Supply DC 24 V ±10 %

Ultrasonic Flowmeter for built-in use｜High precision type

Ultrasonic flowmeter Detector (size: 4 mm, 6 mm)

UCUF-E

PFA ultrasonic flowmeter detector designed for high-precision measurement of small flow rates of ultrapure water and various chemical solutions, used in combination with an SFC-type converter.
All wetted parts are made of PFA, with no moving parts and no mechanical sealing parts such as O-rings that can easily cause liquid accumulation.
The ideal clean structure makes this flowmeter suitable for processes requiring high cleanliness, such as semiconductor manufacturing equipment.

Product spec
Fluid to be measured Liquids in general Measuring range Max.　0 to 8 L/min
Min.　0 to 50 mL/min
Fluid temperature 10 to 60 ℃ Size 4 mm, 6 mm
Fluid pressure 0.5 MPa max. Accuracy ±1 % R.D.（Flow velocity ≧ 1 m/s）

Ultrasonic Flowmeter Detector (size: 10 mm to 20 mm)

UCUF-K

PFA ultrasonic flowmeter detector designed for high-precision measurement of ultrapure water and various chemical solutions, to be used in combination with an SFC type converter.
All wetted parts are made of PFA, with no moving parts and no mechanical sealing parts such as O-rings that can easily cause liquid accumulation.
The ideal clean structure makes this flowmeter suitable for processes that require a high level of cleanliness, such as semiconductor manufacturing equipment.

Product spec
Fluid to be measured Liquids in general Measuring range Max.　0 to 80 L/min
Min.　0 to 1 L/min
Fluid temperature 10 to 60 ℃ Size Standard: 10mm, 15mm, 20mm
Fluid pressure 0.5 MPa max. Accuracy ±1 % R.D.（Flow velocity ≧ 1 m/s）

DIN Rail mounting type Ultrasonic Flowmeter Converter

SFC3000

DIN rail mounting type converter used in combination with the UCUF detector. The latest electronic technologies such as a digital signal processor (DSP) are used to dramatically reduce the effects of air bubbles contained in fluids in semiconductor manufacturing processes, chemical processes, etc.

Product spec
Output Pulse, alarm, current Communication RS485
Power Supply DC 24 V ±10 % Material ABS resin
Ambient temperature 0 to 60 ℃ Installation DIN rail

Panel mounting type Ultrasonic Flowmeter Converter

SFC4000

This Panel mounting type Converter is used in combination with the UCUF detector and can display instantaneous flowrate, totalized flowrate, and various statuses, as well as check and change various parameters.
The latest electronic technologies such as a digital signal processor (DSP) are used to dramatically reduce the effects of air bubbles contained in fluids in semiconductor manufacturing processes, chemical processes, etc.

Product spec
Output Pulse, alarm, current Communication RS485
Display LCD with backlight Power Supply DC 24 V ±10 %
Material ABS resin Ambient temperature 0 to 50 ℃
Installation Panel mounting

Ultrasonic Flowmeter for built-in use｜Micro flow type

Ultrasonic Flowmeter for Micro flow rate

UCUF-02M/SFC-010L

PFA ultrasonic flowmeter for liquid micro flow rate with a minimum full-scale flow rate setting of 10 mL/min.
Capable of measuring micro flow rate of ultrapure water and various chemical solutions with high accuracy.

Product spec
Fluid to be measured Liquids in general Measuring range Max. 0 to 100 mL/min
Min. 0 to 10 mL/min
Fluid temperature 10 to 90 ℃ Size 2.5 mm
Fluid pressure 0.5 MPa max. Accuracy ±1 % R.D（≧ 25 mL/min）
Output Pulse, alarm, current Display 4-digit LED Instantaneous flow rate (mL/min)
Power Supply DC 24 V ±10 % Installation(converter) DIN rail

Ultrasonic Flowmeter for built-in use｜High temperature type

Ultrasonic Flowmeter for High-temperature application

UCUF-04MT/SFC-010T

PFA ultrasonic flowmeter for high-temperature liquids with fluid temperatures up to 180 °C.
The wetted parts are made of a special grade of PFA, enabling high-temperature fluids such as pure water and various chemical solutions to be measured with high accuracy.

Product spec
Fluid to be measured Liquids in general Measuring range Max. 0.8 ～ 2.0 L/min
Min. 0.1 ～ 0.8 L/min
Fluid temperature 10 to 180 ℃ Size 4 mm
Fluid pressure 0.5 MPa max.
(Fluid temperature < 120 ℃)		 Accuracy ±1 % R.D
(flow velocity ≥ 1 m/s)
Output Pulse, alarm, current Display 4-digit LED (instantaneous flow rate %)
Power Supply DC 24 V ±10 % Installation(converter） DIN rail

Vortex Flow Sensors

Vortex flow sensor [PPS resin]

VF-2000

A cost-effective vortex flow sensor for liquids, featuring a body made of PPS resin
・Connection size: 3/8" to 1/2"

Vortex flow sensor [PPS resin]

VF-2200

A cost-effective vortex flow sensor for liquids, featuring a body made of PPS resin
・Connection size：DN25 (1")

Vortex flow sensor [PPS resin]

VF-2300

A cost-effective vortex flow sensor for liquids, featuring a body made of PPS resin
・Connection size：DN32 (1-1/2")

Vortex flow sensor [PFA]

VF-3000

A vortex flow sensor for liquids with a clean design, featuring a body made of fluororesin (PFA)
・Connection size：3/8" to 1"

Flow Controllers for Built-in Use｜Integrated type

Flow Controller

CLFC300

Flow controller integrating a control valve and control circuit section with a PFA high-precision ultrasonic flowmeter for flow detection.
It can be used for flow control of pure water, ultrapure water, various chemical solutions, CMP slurry, etc.

Flow Controllers for Built-in Use｜Separate-type

Flow Control System

FC6000

Separate type flow control system consisting of PFA's UCUF type high-precision ultrasonic flowmeter, FCV control valve, and FCA6000 controller with converter for ultrasonic flowmeter.
A wide range of flow control is possible by selecting the ultrasonic flowmeter detector and control valve.
It can be used for flow control of pure water, ultrapure water, various chemical solutions, CMP slurry, etc.

Flow Control System

FC6500

The FC6500 is a separate type flow control system.
The valve operates to maintain a constant flow rate at a target value by taking in flow signals from various sensors via analog input.
The FC6500 series consists of a control valve with all fluororesin wetted parts and flow controller.

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