FC6000

Flow Measurement

Flowmeters and Controllers for pure water/chemical equipment

Flow Controllers for Built-in Use｜Separate-type

The FC6000 is a separate-type flow controller system which enables a compact system design.
It consists of control valve, flow detector, and flow controller. The FCA6000 series flow rate controller integrates highly accurate ultrasonic flowmeter.

Control valve: FCV series
Flow detector: UCUF series
Flow rate controller: FCA6000 series

The FC6000 series can control a wide range of flow rates with an extensive lineup of flow rate detectors and control valves.
Also, higher safety and greater freedom in layout can be realized by separating the measurement and control part from the process fluid part, such as the flow detector and the control valve.
The reliable FC6000 series is best suited for handling chemical liquids such as in semiconductor processes which require highly accurate flow rate control.

Catalogs and Brochures

FC6000
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*Specifications are subject to change without prior notice.

Features

Improved bubble resistance and flow measurement
The conventional ultrasonic flowmeters used to have difficulties in measuring fluids containing bubbles because the bubbles disturb the propagation of ultrasound waves.
The FCA6000 series uses our unique, proven signal processing technology, which makes it possible to measure the flow even when the bubbles contain.
Furthermore, by detecting and removing abnormal outputs based on our extensive field experience, bubble resistance has been greatly improved, as well as measurement stability of the flowmeter.
Enhanced safety and freedom in layout
The flow detector and the control valve in the process fluid part are separated from the measurement and control part, ensuring enhanced protection against liquid leakage as well as greater freedom in layout.
Support for a wide flow range
The FCA6000 series covers a wide range of flow rate, from a minimum of 2.5 to 25 mL/min up to 1 to 10 L/min.
Low power consumption
The FCA6000 series consumes less current than existing converters.
CE marking
Complies with EU EMC, RoHS2, and low voltage requirements
(EMC standards: EN61326-1: 2013, EN61326-2-3: 2013)
High corrosion resistance
The UCUF series uses highly corrosion resistant PFA and PTFE for the wetted parts and can be used to handle chemical liquids in the semiconductor and other industries.

Specifications

Control Valve

Model	FCV-1000S	FCV-3000
Nominal diameter	Φ3/8”, Φ1/2”	Φ1/4”
Flow range	Max. 10 L/min Min. 200 mL/min	Max. 2 L/min Min. 2.5 mL/min
Fluid Temperature	5 to 50 ℃
Fluid Pressure	0.3 MPa max.
Process Connection	PTFE, PFA
Accuracy	Velocity 1m/s or larger: ±1% of the reading Velocity less than 1m/s: less than ±0.01 m/s

Ultrasonic Flowmeter (Detector)

Model	UCUF-04K	UCUF-06K	UCUF-10K	UCUF-04E	UCUF-06E	UCUF-04M	UCUF-06M
Maximum flow range	3L/min	8L/min	10L/min	3L/min	8L/min	2L/min	8L/min
Nominal size	4mm	6mm	10mm	4mm	6mm	4mm	6mm
Process connection	Φ3/8”		Φ1/2”	Φ3/8”		Φ1/4”	Φ3/8”
Accuracy	Velocity 1m/s or larger: ±1% of the reading Velocity less than 1m/s: less than ±0.01 m/s
temperature	10 to 60℃					10 to 90℃
Wetted part material	New PFA					PFA
Construction	Jet-proof (IP65)
Coupling cable	Coaxial cable×2, PVC cover, 5 m (standard)

Controller

Model	FCA6100	FCA6200	FCA6300
Output signal	Flow rate signal, Flow rate alarm, Action mode, Pulse output
Input signal	Flow set point, Control start/Stop, Totalizer reset, Sensor
Control accuracy	Flow rate > 30%FS: ±3% of the target value, flow rate ≦ 30%FS: 5% of the target value, response time within 3 seconds
Display	2 lines, 16 alphanumeric letters LCD with a backlight Alarm: red (LED), status: green (LED)
Construction/ Installation	Indoor use (IP 20 equivalent), panel mount
Power supply	24 V DC ±10%