FC6500

Flow Measurement

Flowmeters and Controllers for pure water/chemical equipment

Flow Controllers for Built-in Use｜Separate-type

The FC6500 series is a separate-type flow control system that captures flow signals from various sensors in analog form and controls valves to stabilize the flow rate at the target value. It consists of a control valve, of which the wetted parts are made of fluorocarbon resin, and a flow controller.

Flow control valve: FCV series
Flow controller: FCA6500 series

The FC6500 series can control a wide range of flow rates with an extensive lineup of control valves. Its design with physically separated control valve and control unit enhances safety and layout flexibility.
The FC6500 series is ideal for process management of chemical liquids and deionized water in semiconductor and other manufacturing processes.
Besides flow rate, the FC6500 series can also be used as a temperature or pressure control system by regulating the flow control valve.

Catalogs and Brochures

FC6500
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*Specifications are subject to change without prior notice.

Features

Enhanced safety and layout flexibility
The flow detector and the control valve in the process fluid part are separated from the measurement and control part, ensuring enhanced protection against liquid leakage as well as greater layout flexibility.
Support for a wide flow range
The FCV series control valves can cover a wide range of flow rates, from a minimum of 10 to 100 mL/min up to 1 to 10 L/min.
CE marking
Complies with EU EMC, RoHS2, and low voltage requirements (EMC standards: EN61326-1: 2013, EN61326-2-3: 2013)

Specifications

Control Valve

Model	FCV-1000S	FCV-3000
Nominal diameter	Φ3/8”, Φ1/2”	Φ1/4”
Flow range	Max. 10 L/min Min. 200 mL/min	Max. 2 L/min Min. 2.5 mL/min
Fluid Temperature	5 to 50 ℃
Fluid Pressure	0.3MPa
Process Connection	PTFE, PFA

Controller

Model	FCA6510	FCA6520	FCA6530
Analog input (Current flow rate)	4 to 20 mA DC Input impedance: 250 Ω	0 to 10 V DC Input impedance: 730 kΩ	4 to 20 mA DC Input impedance: 250 Ω
Digital input (Change of control)	Non-voltage contact input Close ON: Start control, Open OFF: Stop control
Analog output (Flow rate re-output)	1 to 5 V DC Allowable load resistance: 500 kΩ or higher	0 to 10 V DC Allowable load resistance: 500 kΩ or higher	4 to 20 mA DC Allowable load resistance: 500 Ω or lower
Digital output (Alarm)	Open collector output (rated value: 30 V DC, 50 mA) Logic: A (NO)/B (NC) set at the factory
Control accuracy	Flow rate (PV) > 30%FS: ±3% of the target value (SP) Flow rate (PV) ≦ 30%FS: ±5% of the target value (SP) Response time within 3 seconds * Analog inputs from detectors must be updated without delay.
Display	2 lines, 16 alphanumeric letters LCD with a backlight Alarm: red (LED), status: green (LED)
Construction/ Installation	Indoor use (IP 20 equivalent), panel mount
Power supply	24 V DC ±10%