UCUF-02M/SFC-010L

Flow Measurement

Flowmeters and Controllers for pure water/chemical equipment

Ultrasonic Flowmeter for built-in use｜Micro flow type

The UCUF-02M/SFC-010L ultrasonic flowmeter is designed for measuring small flow rates of pure water, ultrapure water, and chemical liquids.
The size of the measuring section is φ2.5 mm,which allows the flowmeter to cover small flow rates which are difficult for other UCUF flowmeters to measure.
All wet parts are made of special-grade PFA molds for the semiconductor industry and have no moving parts or sealing mechanism which would accumulate liquid components.
The simple and smooth construction leaves no residues and is ideal for processes such as semiconductor manufacturing which requires ultimate cleanliness.
The inlet and outlet of the flowmeter are formed by standardized tubes, so the flowmeter can connect to various PFA fittings.

Catalogs and Brochures

UCUF-02M/SFC-010L
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*Specifications are subject to change without prior notice.

Features

Small size: The UCUF-02M/SFC-010L can measure ultrasonic propagation through liquids in the φ2.5 tubing, which is difficult for other flowmeters to measure.
Low flow measurement: 0 to 10 mL/min
EMC compliance: EN61326-1
RoHS compatible
Liquids with kinematic viscosity of as high as 40 mm²/s can be measured.
Detector with highly clean construction
Corrosion resistant and easy to install
Accuracy: Within ±1% of the reading at a flow rate of 25 mL/min or more

Applications

Pure water and ultrapure water in the semiconductor manufacturing process
Chemical feeding
Highly corrosive chemicals
Chemical mechanical polishing (CMP) slurries
Process liquids of small flow rate
Ideal for flow measurement and control of cleaning and CMP processes

Specifications

Detector

Measuring medium	Liquids (those that do not contain air bubbles and permeate or corrode PFA)
Nominal diameter	1/4"
Flow range	Max. 0 to 100 mL/min Min. 0 to 10 mL/min Full scale setting in 10 mL/min steps
Fluid Temperature	10 to 90 °C
Fluid Pressure	0 to 0.5 Mpa
Process Connection	PFA tube end
Accuracy	±1% RD (at a flow rate of 25 mL/min or more) ±0.25 mL/min (at a flow rate of up to 25 mL/min) For water of 20℃

Compatible Convertor

Model	SFC-010L
Display	4-digit LED, Instantaneous flow rate (mL/min)
Output	1) Current: 4 to 20 mA DC(Load resistance: within 500 Ω) 2) Frequency: Open collector pulse Load rating: 30 V DC, 10mA 0 to 1000 Hz 3) Alarm: Open collector, 2 points Load rating: 30 V DC, 10 mA
Power supply	24 V DC± 10%
Construction	IP20 (indoor use)
Installation	DIN rail installation