The CLFC300 series is flow controller which integrates all functions of an ultrasonic flowmeter, a control valve, and a circuit for flow computation and valve control. Its control function can quickly follow the target flow rate. Thus, the CLFC300 is ideal for liquid control which is essential in semiconductor manufacturing for the constant supply of chemicals and flow control of DIW and slurry.
CLFC300 Series
*Specifications are subject to change without prior notice.
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