UCM-04A/06A

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Flow Measurement
Flowmeters and Controllers for pure water/chemical equipment
Ultrasonic Flowmeter for built-in use｜Flow Monitors

The UCM-04A/06A is the converter integrated type ultrasonic flowmeter for small flow that offers precise and stable flow measurement for ultra-pure water and chemicals. A compact body with a detector and converter saves installation space. The 7-segment LEDs and clear bar graph indication on the front panel allows easy reading in the field.
The wetted parts are consisting of the molded PFA specified for semiconductor industries. The simple and clean construction without any moving parts and without sealing pockets where liquids stagnate, makes the UCM-04A/06A an ideal choice for the clean process such as the semiconductor plant.
The flowmeter has the inlet and outlet tubes of standard dimensions suitable for various PFA fittings. In the services where only flow monitor has been simply used so far, the UCM-04A/06A can be applied without difficulties.

Catalogs and Brochures

*Specifications are subject to change without prior notice.

Features

  • Integration of detector and converter makes the piping and wiring simple.
  • One consolidated body saves installation space.
  • 7-segment LEDs and bar graph on the front panel makes reading easy even at dark place.
  • The dedicated software makes parameter setting like alarms easier than ever.
  • The meter contains ideal and clean detector.
  • The hall element makes zero adjustment surely.
  • The RS-485 makes parameter setting easy.
  • RoHS compliance

Applications

  • Pure water and ultra-pure water services in semiconductor manufacturing plants
  • Chemical feedings
  • Corrosive chemicals
  • Suitable for very low and low fl ow rate services such as cleaning equipments

Specifications

Model UCM-04A UCM-06A
Measuring medium Liquid general (exclude liquids with bubbles and permeable liquids)
Nominal diameter φ6.35 x φ4.35 tube φ9.53 x φ6.35 tube
Flow range Max.: 0 to 3.0 L/min
Min.: 0 to 0.2 L/min		 Max.: 0 to 8.0 L/min
Min.: 0 to 1.0 L/min
Fluid Temperature 10 to 60°C
Fluid Pressure 0 to 0.4 MPa
Process connection PFA Tube ends
Accuracy ±1% F.S.
(±8mL/min for flow range 0 to 500mL/min or less)		 ±1% F.S.
(±17mL/min for flow range 0 to 1000mL/min or less)

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