UCUF-E

Flow Measurement

Flowmeters and Controllers for pure water/chemical equipment

Ultrasonic Flowmeter for built-in use｜High precision type

The UCUF-E series ultrasonic flowmeter is designed for measuring small flow rates of ultrapure water and chemical liquids. It is comprised of the UCUF-E detector and SFC converter. All wet parts of the detector are made of special-grade PFA molds for the semiconductor industry and have no moving parts or sealing mechanism such as O-rings which would accumulate liquid components. The simple and smooth construction leaves no residues and is ideal for processes such as semiconductor manufacturing which requires ultimate cleanliness. The SFC converter significantly reduces the effect of bubbles in liquid, which cause problems in semiconductor and chemical processes.
It has an adjustment function to off set the eff ect on the kinematic viscosity of liquids, making the converter compatible with various chemicals. The RS485 communication function enables integrated management of the process. For details, see the Technical Guidance of the converter.

Catalogs and Brochures

UCUF-E Series
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*Specifications are subject to change without prior notice.

Features

EMC compliance: EN61326-1: 2013/EN61326-2-3:2013
RoHS compatible
Detachable detector cables with connectors
Liquids with kinematic viscosity of as high as 40 mm²/s can be measured
Accuracy: Within ± 1% of the reading at flow velocity of 1 m/sor more
Wide range ability of 100:1 as a typical example
Detector with highly clean construction
Corrosion resistant and easy to install

Specifications

Detector

Measuring medium	Liquids (Without bubbles, and homogeneously mixed)
Nominal diameter	04E：4mm、06E：6mm
Flow range	04E: Max. 0 to 3000 mL/min Min. 0 to 50 mL/min 06E: Max.0 to 8000 mL/min Min. 0 to 400 mL/min
Fluid Temperature	+10 to 60°C
Fluid Pressure	0 to 0.5MPa
Process connection	PFA tube end
Accuracy	04E： ±1% of reading at flow rate 800 mL/min or more ±8 mL /min at flow rate less than 800 mL/min 06E： ±1% of reading at flow rate 1700 mL/min or more ±17 mL /min at flow rate less than 1700 mL/min

Compatible Convertor

Model	SFC3000
Input	Exclusive cable with a BNC connector from detector
Pulse output	Selectable from frequency pulse, totalizing pulse or fault output By open collector: Load rating: Within 30 VDC, 15 mA ·Frequency pulse output Duty ratio: 1:1 Pulse rate: 0 to 1000 Hz (full scale) ·Totalizing pulse output Unit: x0.1 mL, x1 mL, x10 mL, x1L Pulse width: 0.5 ms, 50 ms, 100 ms ·Fault output when converter or detector is in error. NO or NC is selectable
Current output	4 to 20 mA DC Load resistance : Within 500 Ω
Low flow cutoff	0 to 25 % F.S.
Communication	RS485 installed Protocol: MODBUS Up to 32 units connectable
Power supply	24 VDC±10%
Enclosure	IP20 Indoor use
Installation	DIN rail installation