UCUF-04MT/SFC-010T

Flow Measurement

Flowmeters and Controllers for pure water/chemical equipment

Ultrasonic Flowmeter for built-in use｜High temperature type

The UCUF-04MT ultrasonic flow meter for high-temperature applications is an enhanced version of the UCUF series which are best suited for measuring low flows such as ultra-pure water and chemical liquids. All the wetted parts are made of special grade PFA material and have no moving parts or mechanical
seals such as O-rings. This clean structure without dead pockets makes the flow meter the perfect choice for the semiconductor industry, which requires extreme cleanness.
The SFC-010T is a thin converter, which can be installed on the DIN rail.
Using state-of-the-art technologies such as digital signal processing (DSP), this converter ensures stable Flow measurement by minimizing the adverse effects of bubbles in the fluid, which are significant problems in semiconductor manufacturing and chemical liquids handling processes.
Furthermore, measurement at low flow rate has been stabilized by increasing the time resolution and accelerating signal processing compared with existing products.

Catalogs and Brochures

• UCUF-04MT / SFC-010T

  Download

*Specifications are subject to change without prior notice.

Features

• Saves energy and space
  The SFC-010T is more compact than conventional models.
• High-speed calculation
  The SFC-010T achieves 10-ms high-speed sampling.
• Significantly improved resistance to bubbles
  Bubbles contained in liquids interfere with the propagation of ultrasonic waves and can prevent flow measurement. Based on proven field experience and state-of-the-art DSP signal processing technology, TOKYO KEISO CO., LTD. Has succeeded in achieving stable measurement by detecting the effect of bubbles from waveforms and then eliminating the abnormal output from the measurement values.
• Standards
  • Passed the EMC test conforming to EN 61326-1: 2006
  • RoHS compliant
• Detector
  • Applicable to high-temperature liquids (up to 180°C)
  • Measurable high kinetic viscosity liquids (up to 40 mm²/s)
  • Ideal clean construction
  • High resistance to corrosion and easy installation
• Converter
  Zero-point check
  Zero-point adjustment in advance ensures optimal measurement. Parameter setting
  The dedicated configurator software facilitates parameter setting
  (requires RS-485 communication converter). Display
  Flow rate and status are displayed in 7-segment red LED (4digits).

Applications

• Measuring the flow rate of high-temperature chemical liquids in the semiconductor manufacturing process(Contact us about applicable fluids.)
• Measuring the flow rate of chemical liquids in the supply process(Contact us about applicable fluids.)
• Measuring micro flow rates

Specifications

Converter