UCF006

Flow Measurement

Flowmeters and Controllers for pure water/chemical equipment

Ultrasonic Flowmeter for built-in use｜Flow Monitors

The compact ultrasonic flow monitor UCF006 has reduced significantly the adverse effects caused by the bubbles contained in semiconductor processes by making the measuring tube straight with a negligible small pressure loss.
The improved time resolution and high speed signal processing have made the measurement stable in the low flow domain compared with the conventional flowmeters.
Thus, it is ideal for the semiconductor manufacturing which requires ultimate cleanliness.

Catalogs and Brochures

• UCF006

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*Specifications are subject to change without prior notice.

Features

• Enhanced resistance to bubbles
  The bubbles contained in the liquid disturb the propagation of ultrasonic waves and cause an unstable measurement.
  By making the measuring tube straight the stable measurement has been realized.
• Low pressure loss
  The straight measuring tube has a negligible small pressure loss. It keeps a line pressure.
• Saving space
  A combined construction of a detector and a converter saves installation space.
• Complying with
  Cleared EMC test: EN61326-1: 2013
  RoHS

Specifications