UCUF-SB/SFC011SB

Flow Measurement NEW

Flowmeters and Controllers for pure water/chemical equipment

Ultrasonic Flowmeter for built-in use｜Straight type

The UCUF-SB ultrasonic flowmeter is designed for measuring low flow rate of hyperpure water or various chemical fluids. All the fluid contact portion are made of PFA for the semiconductor industry, and the flowmeter has no movable portion nor mechanical sealing such as O-ring which may cause fluid detention. This flowmeter is most suitable for processes requiring high-level cleanliness of semiconductor manufacturing equipment, etc.
The SFC011SB is a converter for UCUF that enables simultaneous measurement of up to 6 lines. Using state-ofthe-art technologies such as Digital Signal Processing, the converter has reduced significantly the adverse effects caused by the bubbles contained in semiconductor and chemical liquid handling processes.

Catalogs and Brochures

UCUF-SB/SFC011SB
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*Specifications are subject to change without prior notice.

Features

Energy saving and space saving
One SFC011SB unit enables simultaneous measurement of up to six lines. In addition, daisy chaining of multiple units without resorting to crossover wiring is possible.
High-speed processing
30-ms processing.
Zero adjustment
By performing zero adjustment before measurement, you can start the measurement for the fluid under the optimum conditions.
Abundant functions
- 7Seg LED (red, 4 digits) indicates instantaneous flow rate and status.
- Various analog outputs of instantaneous flow rate (select according to output types).
- Frequency output (1 kHz F.S.), error output, instantaneous flow rate upper/lower limit alarm, integrated flow rate output, and integrated flow rate upper limit alarm (open collector).
- RS-485 communication enables parameter settings and flow rate data acquisition.
  * RS-485 communication converter (sold separately) is required.
Applicable standards
- Applicable EMC standards: EN61326-1 and EN61326–2–3
- RoHS2 compliant

Specifications

Detector

Measuring medium	All liquids (Without air bubbles. If using a mixture of liquids, it must be evenly dissolved.)
Nominal diameter	6mm, 1/4”
Flow range	Min. 0 to 50 mL/min Max. 0 to 3000 mL/min
Fluid Temperature	10 to 60℃
Fluid Pressure	0 to 0.5 MPa
Process connection	PFA tube end
Accuracy	±1% of R.D. of the indicated value (800 mL/min or more)

Converter

Model	SFC011SB
Display	4 digits (instantaneous flow rate, status)
Output	Digital output: Select from frequency, integration, alarm, and error Open collector, duty 1:1 Load resistance within 30 V DC, 10 mA Analog output: 4 to 20 mA DC (Standard) Load resistance: 500Ω or less
Power supply	24 V DC ±10%
Construction	Equivalent to IP20 (indoor use)
Installation	DIN rail mounting