Fluororesin ultrasonic flowmeter capable of measuring small liquid flow rates of ultrapure water, various chemical solutions, etc. without moving parts or sensors. Suitable for incorporation into semiconductor manufacturing equipment, chemical equipment, ultrapure water equipment, etc.
GST/SFC011GS is a clamp-on ultrasonic flowmeter for small diameter PFA tube. There is no need for additional piping work because flow rate can be measured just by clamping onto the existing tube. The piping is virtually kept clean.
Most suitable for processes requiring cleanliness such as semiconductor manufacturing equipment, etc.
The compact design detector can be installed in equipment in a space-saving manner. The converter is a multi-channel type, and up to 6 detectors can be connected to one converter.
| Product spec | |||
|---|---|---|---|
| Fluid to be measured | Pure water, Photoresist, Low-K materials, Thinner |
Measuring range |
Max. 0 to 2.0 L/min Min. 0 to 0.5 L/min |
| Fluid temperature | Normal temperature (Temperature change ±0.5 °C) | Applicable tube size |
PFA 1/8”, 1/4”, 4 mm, 5 mm, 6 mm |
| Fluid pressure | 0.5 MPa max. | Accuracy |
±2 % R.D (> 0.8 L/min) |
| Power Supply | DC 24 V ±10 % | Converter mounting | DIN rail |
Clamp-on ultrasonic flowmeter for PFA tubing.
Applicable to tube sizes from small diameter to 1". No tube cutting or installation is required to install the flowmeter, and flow can be measured simply by clamping onto existing tubing.
Most suitable for processes requiring high cleanliness, such as semiconductor manufacturing equipment.
The lineup includes 1-channel and multi-channel converters, and up to 6 detectors can be connected to one converter.
| Product spec | |||
|---|---|---|---|
| Fluid to be measured | Liquids in general | Measuring range |
Max. 0 to 80 L/min Min. 0 to 3 L/min |
| Fluid temperature | 10 to 60℃ | Applicable tube size |
PFA 6 mm, 8 mm, 10 mm, 6.35 mm, 9.53 mm, 12.70 mm, 19.05 mm, 25.40 mm |
| Fluid pressure | 0.5 MPa max. | Accuracy |
±2 % R.D (> 0.8 L/min) |
| Power Supply | DC 24 V ±10 % | Converter mounting | DIN rail |
UF is a straight PFA tube type ultrasonic flowmeter with integrated converter and display.
It is suitable for a wide range of applications for ultrapure water, pure water, and water flow management.
| Product spec | |||
|---|---|---|---|
| Fluid to be measured | Ultrapure water, pure water, water |
Measuring range |
Max. 0 to 150 L/min Min. 0 to 20 L/min |
| Fluid temperature | 10 to 90 ℃ | Size | 1/2", 3/4", 1" |
| Fluid pressure | 0.5 MPa max. | Accuracy | ±2 % F.S. |
| Power Supply | DC 24 V ±10 % | ||
Compact PFA ultrasonic flow monitor for water.
The straight structure of the flow measurement section eliminates air bubble accumulation in the fluid, and there is almost no pressure loss.
Suitable for measuring water flow rate in semiconductor manufacturing equipment, etc., where high cleanliness is required.
| Product spec | |||
|---|---|---|---|
| Fluid to be measured | Pure water, water | Measuring range | 0 to 8 L/min |
| Fluid temperature | 10 to 80°C | Size | 6 mm |
| Fluid pressure | 0.5 MPa max. | Accuracy |
±2 % R.D (> 1.7 L/min) |
| Power Supply | DC 24 V ±10 % | ||
PFA ultrasonic flow monitor with bar graph display for stable measurement of flow rates of pure water, various chemical solutions, etc.
The detector and converter are integrated into a compact, space-saving unit, and the flow rate is displayed by a 7-segment LED and bar graph on the front panel, allowing the flow rate to be checked on site.
| Product spec | |||
|---|---|---|---|
| Fluid to be measured | Liquids general (Without bubbles) |
Measuring range | Max. 0 to 8.0 L/min Min. 0 to 0.2 L/min |
| Fluid temperature | 10 to 60 ℃ | Size |
UCM-04A：4 mm UCM-06A：6 mm |
| Fluid pressure | 0.4 MPa max. | Accuracy | ±1 % F.S. |
| Power Supply | DC 24 V ±10 % | ||
PFA ultrasonic flowmeter detector designed for high-precision measurement of small flow rates of ultrapure water and various chemical solutions, used in combination with an SFC-type converter.
All wetted parts are made of PFA, with no moving parts and no mechanical sealing parts such as O-rings that can easily cause liquid accumulation.
The ideal clean structure makes this flowmeter suitable for processes requiring high cleanliness, such as semiconductor manufacturing equipment.
| Product spec | |||
|---|---|---|---|
| Fluid to be measured | Liquids in general | Measuring range |
Max. 0 to 8 L/min Min. 0 to 50 mL/min |
| Fluid temperature | 10 to 60 ℃ | Size | 4 mm, 6 mm |
| Fluid pressure | 0.5 MPa max. | Accuracy | ±1 % R.D.（Flow velocity ≧ 1 m/s） |
PFA ultrasonic flowmeter detector designed for high-precision measurement of ultrapure water and various chemical solutions, to be used in combination with an SFC type converter.
All wetted parts are made of PFA, with no moving parts and no mechanical sealing parts such as O-rings that can easily cause liquid accumulation.
The ideal clean structure makes this flowmeter suitable for processes that require a high level of cleanliness, such as semiconductor manufacturing equipment.
| Product spec | |||
|---|---|---|---|
| Fluid to be measured | Liquids in general | Measuring range |
Max. 0 to 80 L/min Min. 0 to 1 L/min |
| Fluid temperature | 10 to 60 ℃ | Size | Standard: 10mm, 15mm, 20mm |
| Fluid pressure | 0.5 MPa max. | Accuracy | ±1 % R.D.（Flow velocity ≧ 1 m/s） |
DIN rail mounting type converter used in combination with the UCUF detector. The latest electronic technologies such as a digital signal processor (DSP) are used to dramatically reduce the effects of air bubbles contained in fluids in semiconductor manufacturing processes, chemical processes, etc.
| Product spec | |||
|---|---|---|---|
| Output | Pulse, alarm, current | Communication | RS485 |
| Power Supply | DC 24 V ±10 % | Material | ABS resin |
| Ambient temperature | 0 to 60 ℃ | Installation | DIN rail |
This Panel mounting type Converter is used in combination with the UCUF detector and can display instantaneous flowrate, totalized flowrate, and various statuses, as well as check and change various parameters.
The latest electronic technologies such as a digital signal processor (DSP) are used to dramatically reduce the effects of air bubbles contained in fluids in semiconductor manufacturing processes, chemical processes, etc.
| Product spec | |||
|---|---|---|---|
| Output | Pulse, alarm, current | Communication | RS485 |
| Display | LCD with backlight | Power Supply | DC 24 V ±10 % |
| Material | ABS resin | Ambient temperature | 0 to 50 ℃ |
| Installation | Panel mounting | ||
PFA ultrasonic flowmeter for liquid micro flow rate with a minimum full-scale flow rate setting of 10 mL/min.
Capable of measuring micro flow rate of ultrapure water and various chemical solutions with high accuracy.
| Product spec | |||
|---|---|---|---|
| Fluid to be measured | Liquids in general | Measuring range |
Max. 0 to 100 mL/min Min. 0 to 10 mL/min |
| Fluid temperature | 10 to 90 ℃ | Size | 2.5 mm |
| Fluid pressure | 0.5 MPa max. | Accuracy | ±1 % R.D（≧ 25 mL/min） |
| Output | Pulse, alarm, current | Display | 4-digit LED Instantaneous flow rate (mL/min) |
| Power Supply | DC 24 V ±10 % | Installation(converter) | DIN rail |
PFA ultrasonic flowmeter for high-temperature liquids with fluid temperatures up to 180 °C.
The wetted parts are made of a special grade of PFA, enabling high-temperature fluids such as pure water and various chemical solutions to be measured with high accuracy.
| Product spec | |||
|---|---|---|---|
| Fluid to be measured | Liquids in general | Measuring range |
Max. 0.8 ～ 2.0 L/min Min. 0.1 ～ 0.8 L/min |
| Fluid temperature | 10 to 180 ℃ | Size | 4 mm |
| Fluid pressure | 0.5 MPa max. (Fluid temperature < 120 ℃) |
Accuracy |
±1 % R.D (flow velocity ≥ 1 m/s) |
| Output | Pulse, alarm, current | Display | 4-digit LED (instantaneous flow rate %) |
| Power Supply | DC 24 V ±10 % | Installation(converter） | DIN rail |
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