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Flow Ultra-Clean Ultrasonic FlowmeterUCUF-02M/SFC-010L



*Specifications are subject to change without prior notice.

The UCUF-02M/SFC-010L ultrasonic flowmeter is designed for measuring small flow rates of pure water, ultrapure water, and chemical liquids.
The size of the measuring section is φ2.5 mm,which allows the flowmeter to cover small flow rates which are difficult for other UCUF flowmeters to measure.
All wet parts are made of special-grade PFA molds for the semiconductor industry and have no moving parts or sealing mechanism which would accumulate liquid components.
The simple and smooth construction leaves no residues and is ideal for processes such as semiconductor manufacturing which requires ultimate cleanliness.
The inlet and outlet of the flowmeter are formed by standardized tubes, so the flowmeter can connect to various PFA fittings.


  • · Small size: The UCUF-02M/SFC-010L can measure ultrasonic propagation through liquids in the φ2.5 tubing, which is difficult for other flowmeters to measure.
  • · Low flow measurement: 0 to 10 mL/min
  • · EMC compliance: EN61326-1
  • · RoHS compatible
  • · Liquids with kinematic viscosity of as high as 40 mm²/s can be measured.
  • · Detector with highly clean construction
  • · Corrosion resistant and easy to install
  • · Accuracy: Within ±1% of the reading at a flow rate of 25 mL/min or more


  • · Pure water and ultrapure water in the semiconductor manufacturing process
  • · Chemical feeding
  • · Highly corrosive chemicals
  • · Chemical mechanical polishing (CMP) slurries
  • · Process liquids of small flow rate
  • · Ideal for flow measurement and control of cleaning and CMP processes

Short Specifications

For Detector

Model UCUF-02M
Measuring Object Liquids (those that do not contain air bubbles and permeate or corrode PFA)
Flow range 0 to 100 mL/min (max.)
0 to 10 mL/min (min.)
Full scale setting in 10 mL/min steps
Accuracy ±1% RD (at a flow rate of 25 mL/min or more)
±0.25 mL/min (at a flow rate of up to 25 mL/min)
For water of 20℃
Fluid temperature 10 to 90 °C
Fluid pressure 0 to 0.5 Mpa
Process connection 1/4" PFA tube end
Material PFA
Construction IP65 (indoor use)
cable 5 m (standard)

For Compatible Convertor

Model SFC-010L
Display 4-digit LED, Instantaneous flow rate (%FS)
1) Current: 
4 to 20 mA DC(Load resistance: within 500 Ω)
2) Frequency: 
Open collector pulse
Load rating: 30 V DC, 10mA 0 to 1000 Hz
3) Alarm: 
Open collector, 2 points
Load rating: 30 V DC, 10 mA
Power supply 24 V DC± 10%
Installation DIN rail installation
Construction IP20 (indoor use)