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Flow11. Flow Controllers for Built-in Use

Flow Controllers for Built-in Use

Flow controller with fluororesin wetted parts capable of controlling small to micro flow rates of pure water, ultrapure water, various chemical solutions, etc. The lineup includes an all-in-one integrated type and a separate type with high installation flexibility. Most suitable for semiconductor manufacturing processes and chemical control processes.

Integral Flow Controller

Flow Controller
CLFC300

Flow controller integrating a control valve and control circuit section with a PFA high-precision ultrasonic flowmeter for flow detection. 

It can be used for flow control of pure water, ultrapure water, various chemical solutions, CMP slurry, etc.

Separate-type Flow Controller

Flow Control System
FC6000

Separate type flow control system consisting of PFA's UCUF type high-precision ultrasonic flowmeter, FCV control valve, and FCA6000 controller with converter for ultrasonic flowmeter. 

A wide range of flow control is possible by selecting the ultrasonic flowmeter detector and control valve. 

It can be used for flow control of pure water, ultrapure water, various chemical solutions, CMP slurry, etc.

Flow Control System
FC6500NEW

The FC6500 is a separate type flow control system.
The valve operates to maintain a constant flow rate at a target value by taking in flow signals from various sensors via analog input. 

The FC6500 series consists of a control valve with all fluororesin wetted parts and flow controller.