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The FC6000 is a separate-type flow controller system which enables a compact system design.
It consists of control valve, flow detector, and flow controller. The FCA6000 series flow rate controller integrates highly accurate ultrasonic flowmeter.
· Control valve: FCV series
· Flow detector: UCUF series
· Flow rate controller: FCA6000 series
The FC6000 series can control a wide range of flow rates with an extensive lineup of flow rate detectors and control valves.
Also, higher safety and greater freedom in layout can be realized by separating the measurement and control part from the process fluid part, such as the flow detector and the control valve.
The reliable FC6000 series is best suited for handling chemical liquids such as in semiconductor processes which require highly accurate flow rate control.
The conventional ultrasonic flowmeters used to have difficulties in measuring fluids containing bubbles because the bubbles disturb the propagation of ultrasound waves.
The FCA6000 series uses our unique, proven signal processing technology, which makes it possible to measure the flow even when the bubbles contain.
Furthermore, by detecting and removing abnormal outputs based on our extensive field experience, bubble resistance has been greatly improved, as well as measurement stability of the flowmeter.
The flow detector and the control valve in the process fluid part are separated from the measurement and control part, ensuring enhanced protection against liquid leakage as well as greater freedom in layout.
The FCA6000 series covers a wide range of flow rate, from a minimum of 2.5 to 25 mL/min up to 1 to 10 L/min.
The FCA6000 series consumes less current than existing converters.
Complies with EU EMC, RoHS2, and low voltage requirements
(EMC standards: EN61326-1: 2013, EN61326-2-3: 2013)
The UCUF series uses highly corrosion resistant PFA and PTFE for the wetted parts and can be used to handle chemical liquids in the semiconductor and other industries.
Model | FCV-1000S | FCV-3000 |
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Nominal diameter | Φ3/8”, Φ1/2” | Φ1/4” |
Flow range | Max. 10 L/min Min. 200 mL/min |
Max. 2 L/min Min. 2.5 mL/min |
Fluid Temperature | 5 to 50 ℃ | |
Fluid Pressure | 0.3 MPa max. | |
Process Connection | PTFE, PFA | |
Accuracy | Velocity 1m/s or larger: ±1% of the reading Velocity less than 1m/s: less than ±0.01 m/s |
Model | UCUF-04K | UCUF-06K | UCUF-10K | UCUF-04E | UCUF-06E | UCUF-04M | UCUF-06M |
---|---|---|---|---|---|---|---|
Maximum flow range |
3L/min | 8L/min | 10L/min | 3L/min | 8L/min | 2L/min | 8L/min |
Nominal size | 4mm | 6mm | 10mm | 4mm | 6mm | 4mm | 6mm |
Process connection | Φ3/8” | Φ1/2” | Φ3/8” | Φ1/4” | Φ3/8” | ||
Accuracy |
Velocity 1m/s or larger: ±1% of the reading Velocity less than 1m/s: less than ±0.01 m/s |
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temperature | 10 to 60℃ | 10 to 90℃ | |||||
Wetted part material | New PFA | PFA | |||||
Construction | Jet-proof (IP65) | ||||||
Coupling cable | Coaxial cable×2, PVC cover, 5 m (standard) |
Model | FCA6100 | FCA6200 | FCA6300 |
---|---|---|---|
Output signal | Flow rate signal, Flow rate alarm, Action mode, Pulse output | ||
Input signal | Flow set point, Control start/Stop, Totalizer reset, Sensor | ||
Control accuracy |
Flow rate > 30%FS: ±3% of the target value, flow rate ≦ 30%FS: 5% of the target value, response time within 3 seconds |
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Display |
2 lines, 16 alphanumeric letters LCD with a backlight Alarm: red (LED), status: green (LED) |
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Construction/ Installation |
Indoor use (IP 20 equivalent), panel mount | ||
Power supply | 24 V DC ±10% |
FlowMeasurement
LevelMeasurement
Related Instruments
Guidance Download
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