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FC6000 SeriesPDF

*Specifications are subject to change without prior notice.

The FC6000 series is a separate-type flow controller system which enables a compact system design.
It consists of control valve, flow detector, and flow controller. The FCA6000 series flow rate controller integrates highly accurate ultrasonic flowmeter.

 · Control valve: FCV series
 · Flow detector: UCUF series
 · Flow rate controller: FCA6000 series

The FC6000 series can control a wide range of flow rates with an extensive lineup of flow rate detectors and control valves.
Also, higher safety and greater freedom in layout can be realized by separating the measurement and control part from the process fluid part, such as the flow detector and the control valve.
The reliable FC6000 series is best suited for handling chemical liquids such as in semiconductor processes which require highly accurate flow rate control.


  • · Improved bubble resistance and flow measurement

    The conventional ultrasonic flowmeters used to have difficulties in measuring fluids containing bubbles because the bubbles disturb the propagation of ultrasound waves.
    The FCA6000 series uses our unique, proven signal processing technology, which makes it possible to measure the flow even when the bubbles contain.
    Furthermore, by detecting and removing abnormal outputs based on our extensive field experience, bubble resistance has been greatly improved, as well as measurement stability of the flowmeter.

  • · Enhanced safety and freedom in layout

    The flow detector and the control valve in the process fluid part are separated from the measurement and control part, ensuring enhanced protection against liquid leakage as well as greater freedom in layout.

  • · Support for a wide flow range

    The FCA6000 series covers a wide range of flow rate, from a minimum of 2.5 to 25 mL/min up to 1 to 10 L/min.

  • · Low power consumption

    The FCA6000 series consumes less current than existing converters.

  • · CE marking

    Complies with EU EMC, RoHS2, and low voltage requirements
    (EMC standards: EN61326-1: 2013, EN61326-2-3: 2013)

  • · High corrosion resistance

    The UCUF series uses highly corrosion resistant PFA and PTFE for the wetted parts and can be used to handle chemical liquids in the semiconductor and other industries.

Short Specifications

Control Valve

Model FCV-1000S FCV-3000 FCV-3000T
Flow range Max. 10 L/min
Min. 200 mL/min
Max. 2 L/min
Min. 2.5 mL/min
Max. 500 mL/min
Min. 50 mL/min
temperature 5 to 50 ℃ 10 to 50 ℃
Controllable differential pressure 0.05 to 0.2 MPa
Maximum operating pressure 0.3MPa
Process connection Φ3/8”, Φ1/2” Φ1/4” Φ4mm
Wetted part material PTFE, PFA
Actuator High resolution stepping motor
Coupling cable Multi-core cable, PVC cover, 5 m (standard)

Ultrasonic Flowmeter (Detector)

flow range
3L/min 8L/min 10L/min 3L/min 8L/min 2L/min 8L/min
Nominal size 4mm 6mm 10mm 4mm 6mm 4mm 6mm
Process connection Φ3/8” Φ1/2” Φ3/8” Φ1/4” Φ3/8”
Accuracy Velocity 1m/s or larger: ±1% of the reading
Velocity less than 1m/s: less than ±0.01 m/s
temperature 10 to 60℃ 10 to 90℃
Wetted part material New PFA PFA
Construction Jet-proof (IP65)
Coupling cable Coaxial cable×2, PVC cover, 5 m (standard)


Model FCA6100 FCA6200 FCA6300
Output signal Flow rate signal, Flow rate alarm, Action mode, Pulse output
Input signal Flow set point, Control start/Stop, Totalizer reset, Sensor
Control accuracy Flow rate > 30%FS: ±3% of the target value,
flow rate ≦ 30%FS: 5% of the target value,
response time within 3 seconds
Display 2 lines, 16 alphanumeric letters LCD with a backlight
Alarm: red (LED),
status: green (LED)
Indoor use (IP 20 equivalent), panel mount
Power supply 24 V DC ±10%