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Purgemeter is a small variable area flowmeter with a direct
reading scale for measuring the flow rate of liquids and gases.
We offer a wide product range for various applications from
built-in use to industrial process applications.
Suitable for equipment built-in use such as analyzers,
semiconductor manufacturing equipment, small diameter
lines for industrial processes, etc.
General-purpose type small variable area flowmeter.
Although it is compact, it is also available with an alarm output.
Suitable for a wide range of applications
Product spec | |||
---|---|---|---|
Mounting dimensions | 115 mm | Alarm output | 〇 |
Gas measurement | 〇 | Measuring range (air) |
Min. 0.5 to 5 mL/min (nor) Max. 5 to 50 L/min (nor) |
Liquid measurement | 〇 | Measuring range (water) |
Min. 5 to 50 mL/min Max. 0.4 to 2 L/min |
General-purpose type small variable area flowmeter.
2-point alarm output can be selected.
Suitable for a wide range of applications.
Product spec | |||
---|---|---|---|
Mounting dimensions | 200 mm | Alarm output | 〇 |
Gas measurement | 〇 | Measuring range (air) |
Min. 5 to 50 mL/min (nor) Max. 6 to 60 L/min (nor) |
Liquid measurement | 〇 | Measuring range (water) |
Min. 5 to 50 mL/min Max. 0.2 to 2 L/min |
Corrosion-resistance type purgemeter with all stainless steel meter body.
Product spec | |||
---|---|---|---|
Mounting dimensions | 200 mm | Alarm output | - |
Gas measurement | 〇 | Measuring range (air) |
Min. 80 to 800 mL/min (nor) Max. 6 to 60 L/min (nor) |
Liquid measurement | 〇 | Measuring range (water) |
Min. 5 to 50 mL/min Max. 0.2 to 2 L/min |
Corrosion-resistance type purgemeter with all stainless steel meter body. Among the purgemeter group, it is possible to measure the largest flow rate.
Product spec | |||
---|---|---|---|
Mounting dimensions | 200 mm | Alarm output | 〇 |
Gas measurement | 〇 | Measuring range (air) |
Min. 2.5 to 25 L/min(nor) Max. 60 to 600 L/min (nor) |
Liquid measurement | 〇 | Measuring range (water) |
Min. 0.1 to 1 L/min Max. 3 to 30 L/min |
Glass tube purgemeter for gas measurement.
Among the purge meters, it specializes in measuring micro flow rates.
The wide lineup of mounting dimensions provides a high degree of freedom in equipment design.
Product spec | |||
---|---|---|---|
Mounting dimensions | 115・130・ 145 mm |
Alarm output | 〇 |
Gas measurement | 〇 | Measuring range (air) |
Min. 0.15 to 1.5 mL/min (nor) Max. 6 to 60 L/min (nor) |
Liquid measurement | - | Measuring range (water) | - |
A compact and cost effective purgemeter with a polyacetal (POM) body.
Product spec | |||
---|---|---|---|
Mounting dimensions | 80 mm | Alarm output | 〇 |
Gas measurement | 〇 | Measuring range (air) |
Min. 0.1 to 1 L/min (nor) Max. 2 to 20 L/min (nor) |
Liquid measurement | 〇 | Measuring range (water) |
Min. 0.02 to 0.1 L/min Max. 0.2 to 1 L/min |
A cost effective purgemeter made of acrylic resin integrally molded product.
Product spec | |||
---|---|---|---|
Mounting dimensions | 84 mm | Alarm output | 〇 |
Gas measurement | 〇 | Measuring range (air) |
Small flow rate type
Large flow rate typeMin. 0.2 to 2 L/min (nor) Max. 5 to 50 L/min (nor) Min. 5 to 50 L/min (nor) Max. 30 to 300 L/min (nor) |
Liquid measurement | 〇 | Measuring range (water) |
Small flow rate type
Large flow rate typeMin. 10 to 100 mL/min Max. 0.3 to 3 L/min Min. 0.3 to 3 L/min Max. 1 to 10 L/min |
Made of fluororesin for high corrosion resistance.
Suitable for a wide range of corrosive chemicals and solvents.
Product spec | |||
---|---|---|---|
Mounting dimensions | 79 mm | Alarm output | 〇 |
Gas measurement | 〇 | Measuring range (air) |
Min. 50 to 500 mL/min (nor) Max. 2 to 20 L/min (nor) |
Liquid measurement | 〇 | Measuring range (water) |
Min. 3 to 30 mL/min Max. 0.4 to 2 L/min |
Although the mounting dimension is compact at 150 mm, it can measure relatively large flow rates.
Suitable for measuring the flow rate of various gases in the semiconductor manufacturing process.
Highly reliable due to the use of a seal on the outer periphery of the measuring tube. Many delivery records to various equipment.
Also available for electrolytic polishing treatment and low leakage type.
Widely used in various semiconductor-related equipment.
Reed switch alarm output or PAU optical
An alarm unit can be equipped.
A purgemeter with excellent heat resistance that covers fluid temperatures up to 130°C.
Reed switch alarm output is also available as an option.
A compact purgemeter with a mounting dimension of 80 mm.
Suitable for built-in use to various equipment.
A purgemeter with the same mounting dimensions of 115 mm as the P-100 series.
It is a general-purpose product that uses only water, air, and nitrogen.
P-010 is a lot produced product, so please consider
this if you have 10 or more units with the same
specifications.
General-purpose acrylic resin purgemeter for liquids only.
Reed switch alarm can be selected as an option.
A fluororesin purgemeter with a mounting dimension of
80 mm for liquids only that covers a small flow range.
Many delivery records to various equipment in semiconductor manufacturing processes, such as measurement of pure water, ultrapure water, and chemical solutions.
A PAU alarm unit can be equipped as an option.
A fluororesin purgemeter with a mounting dimension of 150 mm for
liquids only that covers a large flow range.
Many delivery records to various equipment in semiconductor manufacturing processes such as measurement of pure water, ultrapure water, and chemical solutions.
Optional reed switch alarm and PAU alarm unit can be equipped.
A fluororesin purgemeter with a mounting dimension of 115 mm for
liquids only that covers the medium flow range.
Many delivery records to various equipment in semiconductor manufacturing processes such as measurement of pure water, ultrapure water, and chemical solutions.
Reed switch alarm and PAU alarm unit can be equipped as an option.
A fluororesin purgemeter with a mounting dimension of
100 mm for liquids only that covers the medium flow
range.
Many delivery records to various equipment in semiconductor manufacturing processes such as measurement of pure water, ultrapure water, and chemical solutions.
Reed switch alarm can be selected as an option.
FlowMeasurement
LevelMeasurement
Related Instruments
Guidance Download
* Please scan the QR code with your smartphone to access this website page.