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Flow PurgemeterP-820

Purgemeter P-820

P-820 PDF

-Advice for your product selection Catalog PDF

*Specifications are subject to change without prior notice.

Just like the popular P-810 model, the P-820 is also widely used in semiconductor production. Models with reed switch type alarm contact are available.

Major Applications

Flow measurement in semiconductor production equipment

Standard Specifications

Measuring fluid Gases
Liquid (Equivalent to water: Density 1.0g/cm³, Viscosity 1.0mPa·s)
Measuring range Air
P-821 :  
Min. 0.5 to 5 mL/min(nor)
Max. 12 to 60 L/min(nor)
P-823:  
Min. 5 to 50 mL/min(nor)
Max. 6 to 60 L/min(nor)
Water
P-821 :  
Min. 5 to 50 mL/min
Max. 0.4 to 2 L/min
P-823:  
Min. 5 to 50 mL/min
Max. 0.2 to 2 L/min
·When selecting a flow range, refer to "Index & Quick Reference for P Series Purgemeters" (TG-S0001).
Range ability 10:1(10:2 for some models)
Indication accuracy P-821: ±5% F.S.
P-823: ±3 F.S.
Fluid pressure Max. 0.8 MPa
Fluid temperature Max. 120°C (Depends on the gasket material)
Material
Wetted parts:  
SCS14(Standard), SUS316(Electrolytically polished)
Tapered tube:  
Heat-resistant glass
Gasket:  
Fluoro rubber (Max. 120°C)
Chloroprene rubber (Max. 80°C)
·The maximum fluid temperature for each gasket material may vary depending on usage and ambient conditions.
Mounting plate:  
SPCC or C2801P
Cover:  
Acrylic

Process Connection Rc: 1/4"(Standard), 1/8"
NPT: 1/4", 1/8"
SW: 1/4", 3/8"
VCR: 1/4", 3/8"
Mounting Lock nut mount on the panel front (Standard)
Bezel mounting
Mass approx. 0.6kg (P-821)