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Flow PurgemeterP-820

Purgemeter P-820

P-820 PDF

-Advice for your product selection Catalog PDF

*Specifications are subject to change without prior notice.

Just like the popular P-810 model, the P-820 is also widely used in semiconductor production. Models with reed switch type alarm contact are available.

Major Applications

Flow measurement in semiconductor production equipment

Standard Specifications

Measuring medium Gases
Liquid (Equivalent to water: Density 1.0g/cm³, Viscosity 1.0mPa·s)
Nominal diameter Rc: 1/4"(Standard), 1/8"
NPT: 1/4", 1/8"
SW: 1/4", 3/8"
VCR: 1/4", 3/8"
Flow range Air
P-821 :  
Max. 12 to 60 L/min(nor)
Min. 0.5 to 5 mL/min(nor)
Max. 6 to 60 L/min(nor)
Min. 5 to 50 mL/min(nor)
P-821 :  
Max. 0.4 to 2 L/min
Min. 5 to 50 mL/min
Max. 0.2 to 2 L/min
Min. 5 to 50 mL/min
·When selecting a flow range, refer to "Index & Quick Reference for P Series Purgemeters" (TG-S0001).
Fluid temperature Max. 120°C (Depends on the gasket material)
Fluid pressure 0.8 MPa max.
Accuracy P-821: ±5% F.S.
P-823: ±3 F.S.