contact us

Flow PurgemeterP-880

Purgemeter P-880

P-880 PDF

-Advice for your product selection Catalog PDF

*Specifications are subject to change without prior notice.

The P-880 is an area purgemeter for measuring micro flow rates of gases. This purgemeter is equipped with an improved valve to accurately control the flow rate. The P-880 is ideal for measuring and controlling micro flow rates.

Major Applications

  • 1. Built-in use for equipment
  • 2. Biotechnology industry
  • 3. Semiconductor-related gas equipment

Standard Specifications

Measuring fluid Gases
Measuring range
Air :  
Min. 0.15 to 1.5 mL/min (nor)
Max. 6 to 60 L/min (nor)
·When selecting a flow range, refer to "Index & Quick Reference for
P Series Purgemeters" (TG-S0001).
·When selecting a flow range, refer to the standard flow rate table.
Range ability 10 : 1
Indication accuracy ±5% F.S.
Fluid pressure Max. 1 MPa
Fluid temperature Max. 120°C (Depends on the gasket material)
Leak rate 1×10-7Pa·m³/s or less(He)
This is a typical value obtained during in-house tests, not a guaranteed value.
Material
Wetted part:  
SCS14/SUS316
Tapered tube:  
Heat-resistant glass
Gasket:  
Fluoro rubber (Max. 120°C)
Chloroprene rubber (CR) (Max. 80°C)
Ethylene-propylene rubber (EPDM) (Max. 80°C)
·The maximum fluid temperature for each gasket material may vary depending on usage and ambient conditions.
Mounting plate:  
A5052 (White alumite)
Cover:  
Transparent PVC
Process Connection Rc: 1/4"(Standard), 1/8"
NPT: 1/4", 1/8"
SW: 1/4"or equivalent, 3/8"or equivalent
VCR: 1/4"or equivalent, 3/8"or equivalent
Standard cleaning Degrease treatment(Ultrasonic cleaning)
Non-water treatment
Mounting Lock nut mount on the panel front.
Mass approx. 0.28kg(P-881)