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Flow Compact Ultrasonic Flow MonitorUCF006



*Specifications are subject to change without prior notice.

The compact ultrasonic flow monitor UCF006 has reduced significantly the adverse effects caused by the bubbles contained in semiconductor processes by making the measuring tube straight with a negligible small pressure loss.
The improved time resolution and high speed signal processing have made the measurement stable in the low flow domain compared with the conventional flowmeters.
Thus, it is ideal for the semiconductor manufacturing which requires ultimate cleanliness.


  • · Enhanced resistance to bubbles

    The bubbles contained in the liquid disturb the propagation of ultrasonic waves and cause an unstable measurement.
    By making the measuring tube straight the stable measurement has been realized.

  • · Low pressure loss

    The straight measuring tube has a negligible small pressure loss. It keeps a line pressure.

  • · Saving space

    A combined construction of a detector and a converter saves installation space.

  • · Complying with

    Cleared EMC test: EN61326-1: 2013

Short Specifications

Measuring fluid Water
Flow range 0 to 8000 mL/min
Fluid temperature 10 to 80°C (0 to 50°C Ambient temperature)
Process connection 3/8" PFA tube end (Outside diameter Φ 9.53, Inside diameter Φ 6.35)
Accuracy ±2% of reading at flow rate 1700 mL/min or more
±34 mL/min at flow rate less than 1700 mL/min
When measuring 20°C water
Cable Exclusive multi-core cable for UCF006
5 m as standard
Enclosure classification IP65 equivalent, indoor use