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Flow Small size and extremely low flow for liquidUCUF-K Series Ultrasonic flowmeter

UCUF-K Series Ultrasonic flowmeter


*Specifications are subject to change without prior notice.

The UCUF-K series ultrasonic flowmeter is designed for measuring small flow rates of ultrapure water and chemical liquids. It is comprised of the UCUF-K detector and SFC converter. All wet parts of the detector are made of special-grade PFA molds for the semiconductor industry and have no moving parts or sealing mechanism such as O-rings which would accumulate liquid components. The simple and smooth construction leaves no residues and is ideal for processes such as semiconductor manufacturing which requires ultimate cleanliness.


  • · EMC compliance: EN61326-1:2013/EN61326-2-3:2013
  • · RoHS compatible
  • · Liquids with kinematic viscosity of as high as 40 mm2/s can be measured.
  • · Accuracy: Within ±1% of the reading at flow velocity of 1 m/s or more
  • · Wide range ability of 100 : 1 as a typical example
  • · Detector with highly clean construction
  • · Corrosion resistant and easy to install

Recommended Applications (Flow Measurement)

  • · Pure water and ultrapure water in the semiconductor manufacturing process
  • · Chemical feeding
  • · Highly corrosive chemicals
  • · Chemical mechanical polishing (CMP) slurries
  • · Process liquids of small and medium flow rate
  • ·  Ideal for flow measurement and control of cleaning and CMP processes

Short Specifications

For Detector

Size 4mm, 6mm, 10mm, 15mm, 20mm
Measuring Object Liquid (Without bubbles, and homogeneously mixed)
Flow range Min: 0 to 0.8 L/min(04K), Max: 18.8 to 80 L/min(20K)
Fluid sound speed 1000 to 2200m/s
Fluid kinetic viscosity 0.3 to 4.0mm2/s
Fluid temperature +10 to +60°C
Fluid pressure 0 to 0.5MPa
Wetted parts material New PFA
Process connection PFA tube end

For Compatible Convertor

Model SFC3000 SFC4000
Installation DIN rail installation Panel mounting
Appearance SFC3000