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Flow Ultrasonic flow meter for small-line high-temperature applicationsUCUF-04MT / SFC-010T

UCUF-04MT / SFC-010T


*Specifications are subject to change without prior notice.

The UCUF-04MT ultrasonic flow meter for high-temperature applications is an enhanced version of the UCUF series which are best suited for measuring low flows such as ultra-pure water and chemical liquids. All the wetted parts are made of special grade PFA material and have no moving parts or mechanical
seals such as O-rings. This clean structure without dead pockets makes the flow meter the perfect choice for the semiconductor industry, which requires extreme cleanness.
The SFC-010T is a thin converter, which can be installed on the DIN rail.
Using state-of-the-art technologies such as digital signal processing (DSP), this converter ensures stable Flow measurement by minimizing the adverse effects of bubbles in the fluid, which are significant problems in semiconductor manufacturing and chemical liquids handling processes.
Furthermore, measurement at low flow rate has been stabilized by increasing the time resolution and accelerating signal processing compared with existing products.


  • · Saves energy and space

    The SFC-010T is more compact than conventional models.

  • · High-speed calculation

    The SFC-010T achieves 10-ms high-speed sampling.

  • · Significantly improved resistance to bubbles

    Bubbles contained in liquids interfere with the propagation of ultrasonic waves and can prevent flow measurement.
    Based on proven field experience and state-of-the-art DSP signal processing technology, TOKYO KEISO CO., LTD. Has succeeded in achieving stable measurement by detecting the effect of bubbles from waveforms and then eliminating the abnormal output from the measurement values.

  • · Standards

    · Passed the EMC test conforming to EN 61326-1: 2006
    · RoHS compliant

  • · Detector

    · Applicable to high-temperature liquids (up to 180°C)
    · Measurable high kinetic viscosity liquids (up to 40 mm²/s)
    · Ideal clean construction
    · High resistance to corrosion and easy installation

  • · Converter

    • · Zero-point check
      Zero-point adjustment in advance ensures optimal measurement.
    • · Parameter setting
      The dedicated configurator software facilitates parameter setting
      (requires RS-485 communication converter).
    • · Display
      Flow rate and status are displayed in 7-segment red LED (4digits).


  • · Measuring the flow rate of high-temperature chemical liquids in the semiconductor manufacturing process(Contact us about applicable fluids.)
  • · Measuring the flow rate of chemical liquids in the supply process(Contact us about applicable fluids.)
  • · Measuring micro flow rates

Short Specifications

Model UCUF-04MT
Measuring Object Liquids (No bubbles. PFA-permeable or corrosive liquids are not allowed.)
Flow range 0 to 2000 mL/min
Fluid sound speed 1000 to 2200 m/s
Fluid kinematic viscosity 0.3 to 40.0 mm²/s
Fluid temperature 10 to 180°C
Fluid pressure 0 to 0.5 MPa
Flow velocity < 1 m/s: 
Flow rate 0.1 to 0.8 L/min
Accuracy ±0.008L/min
Flow velocity ≥ 1 m/s: 
Flow rate 0.8 to 2.0 L/min
Accuracy ±1%
Material Wetted part (Body · Tube): PFA
Cable fitting: PP
Cable sheath: ETFE (White)
Senser cap: PPS/GF30 (Black)
Process connection PFA tube end
Construction IP65 (indoor use)
Exclusive cable 2 coaxial cables attached


Model SFC-010T
Output Analog output
4 to 20 mA DC, 0 to 20 mA DC,
1 to 5 V DC, 0 to 5 V DC, 0 to 10 V DC,
Load resistance is less than 500Ω
Alarm output: High/Low 2 points
Rating: Open collector pulse 30 V DC/10 mA
Time constant 0.0 to 25.0 sec.
Low cutoff 0.0 to 25.0 % F.S.
Display 4-digit LED (flow rate and status)
Power supply/
24 V DC ±10 % Consumption current: Approx. 155 mA
Installation DIN rail installation
Construction IP20 equivalent (indoor)