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UCUF-E Series


*Specifications are subject to change without prior notice.

The UCUF-E series ultrasonic flowmeter is designed for measuring small flow rates of ultrapure water and chemical liquids. It is comprised of the UCUF-E detector and SFC converter. All wet parts of the detector are made of special-grade PFA molds for the semiconductor industry and have no moving parts or sealing mechanism such as O-rings which would accumulate liquid components. The simple and smooth construction leaves no residues and is ideal for processes such as semiconductor manufacturing which requires ultimate cleanliness. The SFC converter significantly reduces the effect of bubbles in liquid, which cause problems in semiconductor and chemical processes.
It has an adjustment function to off set the eff ect on the kinematic viscosity of liquids, making the converter compatible with various chemicals. The RS485 communication function enables integrated management of the process. For details, see the Technical Guidance of the converter.


  • · EMC compliance: EN61326-1: 2013/EN61326-2-3:2013
  • · RoHS compatible
  • · Detachable detector cables with connectors
  • · Liquids with kinematic viscosity of as high as 40 mm²/s can be measured
  • · Accuracy: Within ± 1% of the reading at flow velocity of 1 m/sor more
  • · Wide range ability of 100:1 as a typical example
  • · Detector with highly clean construction
  • · Corrosion resistant and easy to install

Standard Specifications

For Detector

Model UCUF-04E/06E
Measuring fluid Liquids (Without bubbles, and homogeneously mixed)
Flow range
Min. 0 to 50 mL/min
Max. 0 to 3000 mL/min
Min. 0 to 400 mL/min
Max.0 to 8000 mL/min
Fluid sound speed 1000 to 2200m/s
Fluid kinematic viscosity 0.3 to 40mm²/s
Fluid temperature +10 to 60°C
Fluid pressure 0 to 0.5MPa
Body (wet parts): 
New PFA with PFOA free
Sensor and cable cap: 
Sealing at cap: 
Fluorocarbon rubber
Process connection PFA tube end

For Compatible Convertor

Model SFC3000
Input Exclusive cable with a BNC connector from detector
Pulse output Selectable from frequency pulse, totalizing pulse or fault output
By open collector: Load rating: Within 30 VDC, 15 mA

·Frequency pulse output
 Duty ratio: 1:1
 Pulse rate: 0 to 1000 Hz (full scale)

·Totalizing pulse output
 Unit: x0.1 mL, x1 mL, x10 mL, x1L
 Pulse width: 0.5 ms, 50 ms, 100 ms

·Fault output when converter or detector is in error.
 NO or NC is selectable
Current output 4 to 20 mA DC Load resistance : Within 500 Ω
Low flow cutoff 0 to 25 % F.S.
Communication RS485 installed Protocol: MODBUS Up to 32 units connectable
Power supply 24 VDC±10%
Enclosure IP20 Indoor use
Installation DIN rail installation