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Flow06. Purgemeters

Purgemeters

Purgemeter is a small variable area flowmeter with a direct reading scale for measuring the flow rate of liquids and gases. We offer a wide product range for various applications from built-in use to industrial process applications.
Suitable for equipment built-in use such as analyzers, semiconductor manufacturing equipment, small diameter lines for industrial processes, etc.

Standard type

Glass tube Purgemeter
P-100

General-purpose type small variable area flowmeter.
Although it is compact, it is also available with an alarm output.
Suitable for a wide range of applications

Product spec
Mounting dimensions 115 mm Alarm output
Gas measurement Measuring range (air) Min. 0.5 to 5 mL/min (nor)
Max. 5 to 50 L/min (nor)
Liquid measurement Measuring range (water) Min. 5 to 50 mL/min
Max. 0.4 to 2 L/min
Glass tube Purgemeter
P-200

General-purpose type small variable area flowmeter.
2-point alarm output can be selected.
Suitable for a wide range of applications.

Product spec
Mounting dimensions 200 mm Alarm output
Gas measurement Measuring range (air) Min. 5 to 50 mL/min (nor)
Max. 6 to 60 L/min (nor)
Liquid measurement Measuring range (water) Min. 5 to 50 mL/min
Max. 0.2 to 2 L/min
Glass tube Purgemeter
P-400

Corrosion-resistance type purgemeter with all stainless steel meter body.

Product spec
Mounting dimensions 200 mm Alarm output -
Gas measurement Measuring range (air) Min. 80 to 800 mL/min (nor)
Max. 6 to 60 L/min (nor)
Liquid measurement Measuring range (water) Min. 5 to 50 mL/min
Max. 0.2 to 2 L/min
Glass tube Purgemeter
P-510

Corrosion-resistance type purgemeter with all stainless steel meter body. Among the purgemeter group, it is possible to measure the largest flow rate.

Product spec
Mounting dimensions 200 mm Alarm output
Gas measurement Measuring range (air) Min. 2.5 to 25 L/min(nor)
Max. 60 to 600 L/min (nor)
Liquid measurement Measuring range (water) Min. 0.1 to 1 L/min
Max. 3 to 30 L/min
Glass tube Purgemeter
P-880

Glass tube purgemeter for gas measurement. 
Among the purge meters, it specializes in measuring micro flow rates.
The wide lineup of mounting dimensions provides a high degree of freedom in equipment design.

Product spec
Mounting dimensions 115・130・
145 mm
Alarm output
Gas measurement Measuring range (air) Min. 0.15 to 1.5 mL/min (nor)
Max. 6 to 60 L/min (nor)
Liquid measurement - Measuring range (water) -
Glass tube Purgemeter
XP

A compact and cost effective purgemeter with a polyacetal (POM) body.

Product spec
Mounting dimensions 80 mm Alarm output
Gas measurement Measuring range (air) Min. 0.1 to 1 L/min (nor)
Max. 2 to 20 L/min (nor)
Liquid measurement Measuring range (water) Min. 0.02 to 0.1 L/min
Max. 0.2 to 1 L/min
Acrylic resin Purgemeter
P-060

A cost effective purgemeter made of acrylic resin integrally molded product.

Product spec
Mounting dimensions 84 mm Alarm output
Gas measurement Measuring range (air)
Small flow rate type
Min. 0.2 to 2 L/min (nor)
Max. 5 to 50 L/min (nor)
Large flow rate type
Min. 5 to 50 L/min (nor)
Max. 30 to 300 L/min (nor)
Liquid measurement Measuring range (water)
Small flow rate type
Min. 10 to 100 mL/min
Max. 0.3 to 3 L/min
Large flow rate type
Min. 0.3 to 3 L/min
Max. 1 to 10 L/min
Fluororesin Purgemeter
P-710

Made of fluororesin for high corrosion resistance.
Suitable for a wide range of corrosive chemicals and solvents.

Product spec
Mounting dimensions 79 mm Alarm output
Gas measurement Measuring range (air) Min. 50 to 500 mL/min (nor)
Max. 2 to 20 L/min (nor)
Liquid measurement Measuring range (water) Min. 3 to 30 mL/min
Max. 0.4 to 2 L/min

Other lineup

Glass tube Purgemeter
P-530

Although the mounting dimension is compact at 150 mm, it can measure relatively large flow rates.

Glass tube Purgemeter
P-810

Suitable for measuring the flow rate of various gases in the semiconductor manufacturing process.
Highly reliable due to the use of a seal on the outer periphery of the measuring tube. Many delivery records to various equipment.
Also available for electrolytic polishing treatment and low leakage type.

Glass tube Purgemeter
P-820

Widely used in various semiconductor-related equipment. 
Reed switch alarm output or PAU optical An alarm unit can be equipped.

Glass tube Purgemeter
P-830

A purgemeter with excellent heat resistance that covers fluid temperatures up to 130°C.
Reed switch alarm output is also available as an option.

Glass tube purgemeter
P-850

A compact purgemeter with a mounting dimension of 80 mm.
Suitable for built-in use to various equipment.

Glass tube Purgemeter
P-900

General-purpose purgemeter with mounting dimensions of 114mm and 224mm.

Glass tube Purgemeter
P-010

A purgemeter with the same mounting dimensions of 115 mm as the P-100 series.
It is a general-purpose product that uses only water, air, and nitrogen.
P-010 is a lot produced product, so please consider this if you have 10 or more units with the same specifications.

Acrylic resin Purgemeter
P-620

General-purpose acrylic resin purgemeter for liquids only.
Reed switch alarm can be selected as an option.

Fluororesin Purgemeter
P-771

A fluororesin purgemeter with a mounting dimension of 80 mm for liquids only that covers a small flow range.
Many delivery records to various equipment in semiconductor manufacturing processes, such as measurement of pure water, ultrapure water, and chemical solutions.
A PAU alarm unit can be equipped as an option.

Fluororesin Purgemeter
P-772

A fluororesin purgemeter with a mounting dimension of 150 mm for
liquids only that covers a large flow range.
Many delivery records to various equipment in semiconductor manufacturing processes such as measurement of pure water, ultrapure water, and chemical solutions.
Optional reed switch alarm and PAU alarm unit can be equipped.

Fluororesin Purgemeter
P-773

A fluororesin purgemeter with a mounting dimension of 115 mm for
liquids only that covers the medium flow range.
Many delivery records to various equipment in semiconductor manufacturing processes such as measurement of pure water, ultrapure water, and chemical solutions.
Reed switch alarm and PAU alarm unit can be equipped as an option.

Fluororesin Purgemeter
P-774

A fluororesin purgemeter with a mounting dimension of 100 mm for liquids only that covers the medium flow range.
Many delivery records to various equipment in semiconductor manufacturing processes such as measurement of pure water, ultrapure water, and chemical solutions.
Reed switch alarm can be selected as an option.