Thermal Flowmeters

Thermal flow meters are devices that measure flow rate by utilizing the correlation between the amount of heat carried away by the flow and the mass flow rate. In these types of flow meters, flow velocity sensors are placed in the flow path or in the case of bypass types, the main flow paths or capillary tubes are heated.
Usable for various applications, our thermal flowmeters provide a diverse lineup of types to suit specific needs.

Thermal flowmeter
Wide lineup of pipe-insertion types and in-line types compatible with large diameters.
Applicable for low-pressure conditions, biogas, high-purity gases and utility gases.
Suitable for applications such as air conditioning systems, waste incineration facilities and gas supply equipment.

Thermal mass flowmeter
Thermal mass flowmeters can measure the flow rates of various gases without being affected by changes in temperature or pressure.

Wide lineup of two types:
High-precision bypass split type
Full-flow type with a wide flow range.
Suitable for semiconductor manufacturing processes, analytical equipment, gas supply lines and more.

Thermal mass flow controller
Flow controllers combined thermal mass flow meters with control valves.

Thermal Flowmeters
Thermal Mass Flowmeters / Controllers [Bypass type]
Thermal Mass Flowmeters / Controllers [Whole flow type]
Thermal Mass Flowmeters / Controllers [Converter Unit]

Thermal Flowmeters

Thermal Flowmeter

Original thermal mass flowmeter for gases by TOKYO KEISO, based on the theory of heat transfer
We offer a line-up of various sensors, capable of supporting pipe size from DN15 to DN1500.

Metal seal Thermal Flowmeter

SRT1000

Thermal mass flowmeter for gases incorporating TOKYO KEISO's years of expertise, with improved performance including all-metal seals, enhanced reading accuracy and digital output
It supports process pipe size from DN10 to DN1500 with the option to select either a compact type or separate type converter.

Thermal Mass Flowmeters / Controllers [Bypass type]

Thermal Mass Flowmeter [Bypass type]

TF-5000/6000

Thermal mass flowmeter for gases that can measure the mass flow rate of various gases without being affected by process conditions such as pressure and temperature
・TF-5000：Standard type (0.98 MPa max.)
・TF-6000：High-pressure type (32 MPa max.)

Thermal Mass Flow Controller [Bypass type]

TC-1000/2000

Thermal mass flow controller that combines a thermal mass flowmeter for gases with a control valve
It precisely controls the mass flow rate of various gases, unaffected by changes in pressure and temperature.
・TC-1000：Standard type (0.98 MPa max.)
・TC-2000：High-pressure type (10 MPa max.)

Thermal Mass Flowmeter / Controller [Bypass type]

EP-TF-5300/EP-TC-1000/2000V

Explosion-proof type (Ex-d) thermal mass flowmeter and a control valve for gases
It measures and controls the mass flow rate of various gases with high precision, unaffected by changes in pressure and temperature.
・(H-)EP-TF-5300：Mass flowmeter (14.7 MPa max.)
・EP-TC-1000：Control valve (2.9 MPa max.)
・EP-TC-2000V：Control valve (9.8 MPa max.)

Thermal Mass Flowmeter / Controller [Bypass type]

HM1000

General-purpose, cost-effective thermal mass flowmeter / controller for gases
It measures and controls the mass flow rate of various gases, unaffected by changes in pressure and temperature.

Thermal Mass Flowmeter / Controller [Bypass type]

HM5000

High-precision thermal mass flowmeter and controller for gases that measures and controls the mass flow rate of various gases with high accuracy, unaffected by changes in pressure and temperature
It supports a wide flow range from a minimum of 0 - 5 mL/min (nor) to a maximum of 0 - 400 L/min (nor).