EP-TF-5300 Series are Thermal Mass Flowmeter for the gases with a flameproof construction. The mass flow rate of various kinds of gases can be measured, regardless of such process conditions as pressure, temperature etc. The minimum full scale is 5mL/min (nor), and the maximum full scale is 500L/min (nor). Maximum Operating Pressure is 4.9MPa which covers the various applications. Meantime, H-EP-TF-5300 Series (for the high pressure) can cover the max. operating pressure up to 14.7MPa. Thermal Mass Flow Controller (EP-TC-1000 Series) is the flameproof control valve, and this can be used together with EPTF-5300 Series. The mass flow rate of the various kinds of gasses can be automatically controlled. EP-TC-2000V Series is for the high pressure and used together with H-EP-TF-5300 Series, covering the maximum operating pressure of 9.8MPa.
EP-TF-5000/EP-TC-1000
*Specifications are subject to change without prior notice.
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