HM5000

Flow Measurement

Thermal Flowmeters

Thermal Mass Flowmeters / Controllers [Bypass type]

HM5000 is the thermal mass flowmeter for the measurement of gases. There are two types available: a) general-purpose type and b) high performance type. Depending on the application, either of these types can be selected. As for the flow range, it is from minimum 0 - 5mL/min(nor) to maximum 0 - 400L/min(nor).

Catalogs and Brochures

• HM5000

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*Specifications are subject to change without prior notice.

Features

• Flow rate measurment in wide range
  Available for wide range from 0 to 5mL/min(nor) to 0 to 400 L/min (nor).
• High accuracy
  ±1%F.S. (High performance type)
• Miniaturization and improvement of reliability
• The following functions possible to add optionally.
  　・Slow start function (Normal close type)
  　・Output signal: 1 to 5VDC

Applications

• Utility gas supply lines in industries
• Various instruments for analysis
• Semiconductor gas supply lines
• Gas constant flow control and mixture control
• Embedded devices

Specifications