P-820

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Flow Measurement
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Just like the popular P-810 model, the P-820 is also widely used in semiconductor production. Models with reed switch type alarm contact are available.

Catalogs and Brochures

*Specifications are subject to change without prior notice.

Major Applications

  • Flow measurement in semiconductor production equipment

Specifications

Measuring medium Gases
Liquid (Equivalent to water: Density 1.0g/cm³, Viscosity 1.0mPa·s)
Nominal diameter Rc: 1/4"(Standard), 1/8"
NPT: 1/4", 1/8"
SW: 1/4", 3/8"
VCR: 1/4", 3/8"
Flow range Air
P-821 :  
Max. 12 to 60 L/min(nor)
Min. 0.5 to 5 mL/min(nor)
P-823:  
Max. 6 to 60 L/min(nor)
Min. 5 to 50 mL/min(nor)
Water
P-821 :  
Max. 0.4 to 2 L/min
Min. 5 to 50 mL/min
P-823:  
Max. 0.2 to 2 L/min
Min. 5 to 50 mL/min
·When selecting a flow range, refer to "Index & Quick Reference for P Series Purgemeters" (TG-S0001).
Fluid temperature Max. 120°C (Depends on the gasket material)
Fluid pressure 0.8 MPa max.
Accuracy P-821: ±5% F.S.
P-823: ±3 F.S.

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