P-810

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Flow Measurement
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The P-810 is ideal for measuring the flow rates of various gases in semiconductor production. High reliability is ensured by circumferential seals.
The P-810 has a solid track record in applications with various devices.
Electrolytically polished models with low leakage are also available.

Catalogs and Brochures

*Specifications are subject to change without prior notice.

Major Applications

  • Gas flow measurement in semiconductor production equipment, especially for low-leakage lines

Specifications

Measuring medium Gases
Liquid (Equivalent to water: Density 1.0g/cm³,Viscosity 1.0mPa·s)
Nominal diameter Rc: 1/4"(Standard), 1/8"
NPT: 1/4", 1/8"
SW: 1/4", 3/8"
VCR: 1/4", 3/8"
Flow range
Air:  
Max. 6 to 60 L/min(nor)
Min. 5 to 50 mL/min(nor)
Water:  
Max. 0.2 to 2 L/min
Min. 5 to 50 mL/min
·When selecting a flow range, refer to "Index & Quick Reference for P Series Purgemeters" (TG-S0001).
Fluid temperature Max. 120°C (Depends on the gasket material)
Fluid pressure 0.8 MPa max.
Accuracy ±3% F.S.

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