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Flow PurgemeterP-520


P-520 PDF

-Advice for your product selection Catalog PDF

*Specifications are subject to change without prior notice.

The resin construction eliminates the mixing of metallic ions into process liquids.
The P-520 is ideal for pure and ultra-pure waterlines in semiconductor production facilities. Alarm contacts can be added.

Major Applications

Pure waterlines

Standard Specifications

Measuring fluid Liquids
Measuring range Water Min. 1 to 10 L/min
Max. 12 to 60 L/min
· When selecting a flow range, refer to the standard fl ow rate table.
Range ability 10 : 1 (10 : 2 for some models)
Indication accuracy ±5% F.S.
Fluid pressure Max. 0.5 Mpa
Fluid temperature Max. 80°C (Depends on the gasket material or
body material)
Material Wetted parts PVC(Max. 60°C), HT-PVC(Max. 80°C),
PTFE(Max. 80°C)
Tapered tube Heat-resistant glass
Gasket Fluoro rubber
Ethylene-propylene rubber (EPDM)(Max. 80°C)
· The maximum fl uid temperature for each gasket material may vary depending on usage and ambient conditions.
Support SUS304
Cover Transparent PVC
Process Connection Rc: 1/2" (Standard), 3/4", 1"
NPT: 1/2", 3/4", 1"
Mounting Screw mount on the panel front (Standard)
Panel embedded mounting
Mass approx. 1.2kg