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Flow Thermal Mass FlowmeterTF-5000/6000 Series

TF-5000/6000 Series

TF-5000/6000 Series PDF

*Specifications are subject to change without prior notice.

TF-5000/6000is a series of Thermal mass flowmeter. Flow rate of various gases are measured free from the change of process condition such as pressure and temperature.

Features

  • · Wide selection range
  • · High accuracy: ±1.0% F.S
  • · High reliability
  • · Complete supporting instruments

Short Specifications

Measuring range (N2)
Min.: 
0 to 5 mL/min(nor)
Max.: 
0 to 500 L/min(nor)
Fluid pressure Max. 0.98MPa (High pressure version: 39.2MPa)
Fuluid temperature 5 to 55°C
Accuracy ±1% F.S.(at 25°C)
Response Within 3 sec. For 90%
Process connection Rc thread 1/4, 3/8 and 1/2, 1/4,. 3/8 and 1/2NPT(F) thread, Swagelok, VCR, VCO
15A, 20A, 25A JIS10KRF flange
Material
Body: 
SUS316
Seal: 
FKM or CR
Supporting instruments
Convertor unit: 
TM-2000
Power unit: 
TCP
Indicator unit: 
TCDU