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Flow Thermal mass flowmeter/ControllerHM5000

HM5000

HM5000 PDF

*Specifications are subject to change without prior notice.

HM5000 is the thermal mass flowmeter for the measurement of gases. There are two types available: a) general-purpose type and b) high performance type. Depending on the application, either of these types can be selected. As for the flow range, it is from minimum 0 - 5mL/min(nor) to maximum 0 - 400L/min(nor).

Features

  • ·  Flow rate measurment in wide range

    Available for wide range from 0 to 5mL/min(nor) to 0 to 400 L/min (nor).

  • · High accuracy

    ±1%F.S. (High performance type)

  • · Miniaturization and improvement of reliability

  • · The following functions possible to add optionally.

    · Slow start function (Normal close type)
    · Output signal: 1 to 5VDC

Applications

  • · Utility gas supply lines in industries
  • · Various instruments for analysis
  • · Semiconductor gas supply lines
  • · Gas constant flow control and mixture control
  • · Embedded devices

Main specifications

Type General-purpose type
HM5122B
HM5123B
High performance type
HM5111B
HM5112B
HM5113B
Measuring object Gases
Flow range Min.0 - 5mL/min(nor)
Max.0 - 400L/min(nor)
Operating temperature 5 - 45 °C
Max. operating pressure 0.97 MPa
Accuracy ±2%F.S.
(HM5123B: ±4%F.S.)
±1%F.S.
(HM5113B: ±2%F.S.)
Material Flow path: SUS316
Seal: Fluoro rubber
Process connection Standard: 1/4", 3/8", 1/2" SW
Option: 1/4", 3/8", 1/2" VCR, VCO
Power supply
Dedicated power supply unit or 
±15VDC: 
60mA
-15VDC: 
350mA
Output DC0 - 5V