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Flow Thermal Mass FlowmeterEP-TF-5000/EP-TC-1000

EP-TF-5000/EP-TC-1000

EP-TF-5000/EP-TC-1000 PDF

*Specifications are subject to change without prior notice.

EP-TF-5300 Series are Thermal Mass Flowmeter for the gases with a flameproof construction. The mass flow rate of various kinds of gases can be measured, regardless of such process conditions as pressure, temperature etc.
The minimum full scale is 5mL/min (nor), and the maximum full scale is 500L/min (nor). Maximum Operating Pressure is 4.9MPa which covers the various applications.
Meantime, H-EP-TF-5300 Series (for the high pressure) can cover the max. operating pressure up to 14.7MPa.
Thermal Mass Flow Controller (EP-TC-1000 Series) is the flameproof control valve, and this can be used together with EPTF-5300 Series. The mass flow rate of the various kinds of gasses can be automatically controlled.
EP-TC-2000V Series is for the high pressure and used together with H-EP-TF-5300 Series, covering the maximum operating pressure of 9.8MPa.

Features

  • · FLAMEPROOF CONSTRUCTION

    Both Mass Flowmeter and Mass Flow Controller cover the hydrogen atmosphere(JIS Class "1" area). The application has become much wider than before.

  • · HIGH ACCURACY (±1% F.S.)

    The gas mass flow rate can be measured in high accuracy because of our theory and the know-how for many years.

  • · EXTENSIVE FLOW RANGE

    These instruments can be used for the applications from the pilot plant to the actual industrial applications.

  • · SUPPORTING INSTRUMENT READY

    The indication, integration and controlling can be conducted, assembled with TM-1400/2000 Mini Convertor unit.

Short Specifications

EP-TF-5000Mass Flowmeter

Measuring object All types of gases
(Not suitable for gases with solids and particles as well as moisture)
Scale range Min. 0 to 5mL/min(nor)(N2)
Max. 0 to 500L/min(nor)(N2)
Fluid Pressure Standard type EP-TF-5000 ··· 4.9MPa
High press. type: H-EP-TF-5000 ··· 14.7MPa
Fluid Temperature 5 to 50 °C
Measuring accuracy ± 1.0% F.S. (25 °C Std.)
Respons time Within 3 sec., for 90% F.S.
Explosion proof
classification		 d3aG4 (TIIS)
Process connection 1/4 - 3/4, Rc thread, SW, flanges etc.
Material Body: SUS316
Seal: FKM, CR
Recommended
electronics		 TM-2000 Mini converter unit(for flow measurement)

EP-TC-1000/2000 Controller (Control Valve)

Measuring object All types of gases
(Not suitable for gases with solids and particles as well as moisture)
Scale range Min. 0 to 5mL/min(nor)
Max.: 0 to 100L/min (nor)
Max.Op.Press.
Control DP range
Standard type: 
EP-TC-1000
Max.Op.Press.: 
2.9MPa
Control DP range: 
0.07 - 0.3 MPa
High press. type: 
EP-TC-2000
Max.Op.Press.: 
9.8MPa
Control DP range: 
9.8MPa 20 - 80% of primary press.
(20-40% for 20L/min(nor) or more)
Flow control range 2 to 100% of full scale
Respons time Within 3 sec., for 98% of setting value
Gas Temp. 0 to 50 °C
Explosion proof
classification		 d3aG4 (ExdIICT6 for EP-TC-2000)
Process connection 1/4 to 3/8, Rc thread, Sw etc.
Material Body SUS316
Seal Viton, CR
Recommended
electronics		 TM-1400 Mini converter unit(for flow measurement and control)

Combinations

Flow measurement only (With TM-2000 Mini converter unit)

figure1

Flowmeter / Controller (With TM-1400 Mini converter unit)

figure2