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Flow Flow Control SystemFC6500NEW

Flow Control System FC6500

FC6500PDF

*Specifications are subject to change without prior notice.

The FC6500 series is a separate-type flow control system that captures flow signals from various sensors in analog form and controls valves to stabilize the flow rate at the target value. It consists of a control valve, of which the wetted parts are made of fluorocarbon resin, and a flow controller.

 · Flow control valve: FCV series
 · Flow controller: FCA6500 series

The FC6500 series can control a wide range of flow rates with an extensive lineup of control valves. Its design with physically separated control valve and control unit enhances safety and layout flexibility.
The FC6500 series is ideal for process management of chemical liquids and deionized water in semiconductor and other manufacturing processes.
Besides flow rate, the FC6500 series can also be used as a temperature or pressure control system by regulating the flow control valve.

Features

  • · Enhanced safety and layout flexibility

    The flow detector and the control valve in the process fluid part are separated from the measurement and control part, ensuring enhanced protection against liquid leakage as well as greater layout flexibility.

  • · Support for a wide flow range

    The FCV series control valves can cover a wide range of flow rates, from a minimum of 10 to 100 mL/min up to 1 to 10 L/min.

  • · CE marking

    Complies with EU EMC, RoHS2, and low voltage requirements
    (EMC standards: EN61326-1: 2013, EN61326-2-3: 2013)

Short Specifications

Control Valve

Model FCV-1000S FCV-3000
Nominal diameter Φ3/8”, Φ1/2” Φ1/4”
Flow range Max. 10 L/min
Min. 200 mL/min		 Max. 2 L/min
Min. 2.5 mL/min
Fluid Temperature 5 to 50 ℃
Fluid Pressure 0.3MPa
Process Connection PTFE, PFA

Controller

Model FCA6510 FCA6520 FCA6530
Analog input
(Current flow rate)		 4 to 20 mA DC
Input impedance: 250 Ω		 0 to 10 V DC
Input impedance: 730 kΩ		 4 to 20 mA DC
Input impedance: 250 Ω
Digital input
(Change of control)		 Non-voltage contact input
Close ON: Start control, Open OFF: Stop control
Analog output
(Flow rate re-output)		 1 to 5 V DC
Allowable load resistance:
500 kΩ or higher		 0 to 10 V DC
Allowable load resistance:
500 kΩ or higher		 4 to 20 mA DC
Allowable load resistance:
500 Ω or lower
Digital output
(Alarm)		 Open collector output (rated value: 30 V DC, 50 mA)
Logic: A (NO)/B (NC) set at the factory
Control accuracy Flow rate (PV) > 30%FS: ±3% of the target value (SP)
Flow rate (PV) ≦ 30%FS: ±5% of the target value (SP)

Response time within 3 seconds
* Analog inputs from detectors must be updated without delay.
Display 2 lines, 16 alphanumeric letters LCD with a backlight
Alarm: red (LED),
status: green (LED)
Construction/
Installation		 Indoor use (IP 20 equivalent), panel mount
Power supply 24 V DC ±10%