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FlowMeasurement
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LevelMeasurement
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The UCUF-E series ultrasonic flowmeter is designed for measuring small flow rates of ultrapure water and chemical liquids. It is comprised of the UCUF-E detector and SFC converter. All wet parts of the detector are made of special-grade PFA molds for the semiconductor industry and have no moving parts or sealing mechanism such as O-rings which would accumulate liquid components. The simple and smooth construction leaves no residues and is ideal for processes such as semiconductor manufacturing which requires ultimate cleanliness. The SFC converter significantly reduces the effect of bubbles in liquid, which cause problems in semiconductor and chemical processes.
It has an adjustment function to off set the eff ect on the kinematic viscosity of liquids, making the converter compatible with various chemicals. The RS485 communication function enables integrated management of the process. For details, see the Technical Guidance of the converter.
For Detector
Measuring medium | Liquids (Without bubbles, and homogeneously mixed) |
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Nominal diameter | 04E:4mm、06E:6mm |
Flow range |
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Fluid Temperature | +10 to 60°C |
Fluid Pressure | 0 to 0.5MPa |
Process connection | PFA tube end |
Accuracy |
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For Compatible Convertor
Model | SFC3000 |
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Input | Exclusive cable with a BNC connector from detector |
Pulse output |
Selectable from frequency pulse, totalizing pulse or fault output By open collector: Load rating: Within 30 VDC, 15 mA ·Frequency pulse output Duty ratio: 1:1 Pulse rate: 0 to 1000 Hz (full scale) ·Totalizing pulse output Unit: x0.1 mL, x1 mL, x10 mL, x1L Pulse width: 0.5 ms, 50 ms, 100 ms ·Fault output when converter or detector is in error. NO or NC is selectable |
Current output | 4 to 20 mA DC Load resistance : Within 500 Ω |
Low flow cutoff | 0 to 25 % F.S. |
Communication | RS485 installed Protocol: MODBUS Up to 32 units connectable |
Power supply | 24 VDC±10% |
Enclosure | IP20 Indoor use |
Installation | DIN rail installation |
FlowMeasurement
LevelMeasurement
Related Instruments
Guidance Download
* Please scan the QR code with your smartphone to access this website page.