UCF006
*Specifications are subject to change without prior notice.
The compact ultrasonic flow monitor UCF006 has reduced significantly the adverse effects caused by the bubbles contained in semiconductor processes by making the measuring tube straight with a negligible small pressure loss.
The improved time resolution and high speed signal processing have made the measurement stable in the low flow domain compared with the conventional flowmeters.
Thus, it is ideal for the semiconductor manufacturing which requires ultimate cleanliness.
The bubbles contained in the liquid disturb the propagation of ultrasonic waves and cause an unstable measurement.
By making the measuring tube straight the stable measurement has been realized.
The straight measuring tube has a negligible small pressure loss. It keeps a line pressure.
A combined construction of a detector and a converter saves installation space.
Cleared EMC test: EN61326-1: 2013
RoHS
| Measuring medium | Water |
|---|---|
| Nominal diameter | 3/8" (Outside diameter Φ 9.53, Inside diameter Φ 6.35) |
| Flow range | 0 to 8000 mL/min |
| Fluid Temperature | 10 to 80°C (0 to 50°C Ambient temperature) |
| Fluid Pressure | 0 to 0.5 MPa |
| Process Connection | PFA tube end |
| Accuracy |
±2% of reading at flow rate 1700 mL/min or more ±34 mL/min at flow rate less than 1700 mL/min When measuring 20°C water |
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