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FlowMeasurement
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LevelMeasurement
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*Specifications are subject to change without prior notice.
The P-810 is ideal for measuring the flow rates of various gases in semiconductor production. High reliability is ensured by circumferential seals.
The P-810 has a solid track record in applications with various devices.
Electrolytically polished models with low leakage are also available.
Gas flow measurement in semiconductor production equipment, especially for low-leakage lines
Measuring medium |
Gases Liquid (Equivalent to water: Density 1.0g/cm³,Viscosity 1.0mPa·s) |
---|---|
Nominal diameter |
Rc: 1/4"(Standard), 1/8" NPT: 1/4", 1/8" SW: 1/4", 3/8" VCR: 1/4", 3/8" |
Flow range |
|
Fluid temperature | Max. 120°C (Depends on the gasket material) |
Fluid pressure | 0.8 MPa max. |
Accuracy | ±3% F.S. |
FlowMeasurement
LevelMeasurement
Related Instruments
Guidance Download
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