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UCUF-M Series


*Specifications are subject to change without prior notice.

The UCUF series ultrasonic flowmeter is designed for measuring small flow rates of ultrapure water and chemical liquids.
It is comprised of the UCUF-M detector and SFC converter.
All wet parts of the detector are made of special-grade PFA molds for the semiconductor industry and have no moving parts or sealing mechanism such as O-rings which would accumulate liquid components.
The simple and smooth construction leaves no residues and is ideal for processes such as semiconductor manufacturing which requires ultimate cleanliness.
The SFC converter significantly reduces the effect of bubbles in liquid, which cause problems in semiconductor and chemical processes.
It has an adjustment function to offset the effect on the kinematic viscosity of liquids, making the converter compatible with various chemicals.
The DIN rail mount-type saves installation space.
The RS485 communication function enables integrated management of the process.
For details, see the Technical Guidance of the converter.


  • · EMC compliance: EN61326-1
  • · RoHS compatible
  • · A standardized pitch of 80 mm for connecting tubes
  • · Liquids with kinematic viscosity of as high as 40 mm2/s can be measured.
  • · Accuracy: Within ± 1% of the reading at flow velocity of 1 m/s or more
  • · Wide rangeability of 100:1(at low cut-off of 1% F.S.)
  • · Detector with highly clean construction
  • · Corrosion resistant and easy to install


  • · Pure water and ultrapure water in the semiconductor manufacturing process
  • · Chemical feeding
  • · Highly corrosive chemicals
  • · Chemical mechanical polishing (CMP) slurries
  • · Process liquids of small and medium flow rate
  • · Ideal for flow measurement and control of cleaning and CMP processes

Short Specifications

For Detector

Measuring fluid Liquids (those that do not contain air bubbles and permeate or corrode PFA)
Tube inner diameter 2.5, 4(connection 1/4"), 4(connection 3/8"), 6, 10, 15, 20mm
Flow range Max. 0 to 80.0 L/min
Min. 0 to 0.01 L/min
Measuring accuracy ± 1.0% of reading(Flow velocity1m/s)
Refer to the catalog for the accuracy of the velocity less than 1m/s.
Fluid temperature 10 to 90°C
Fluid pressure 0 to 0.5 MPa
Sound speed 1000 to 2200 m/S
Fluid kinematic viscosity 0.8 to 40 mm² /s
Liquid contact material PFA
Process connection PFA tube end
Signal cable 2 coaxial cables (5 m) attached (Up to 30 m with extension cables)
Connecter SMB, BNC
Enclosure classification IP65 (indoor use)