QR code
* Please scan the QR code with your smartphone to access this website page.
On Flow Measurement F-0006
Flow Measurement of Pure/Ultra Pure Water
Pure/Ultra Pure water is mainly used for cleaning process of semiconductor industries. We, at Tokyo Keiso, are in a position to offer different types of flowmeters for this application. We are pleased to introduce the following examples and recommendations.
Problems and difficulties in measurement of Pure/Ultra Pure water flow
Lack of electric conductivity in measuring fluid
Pure/Ultra Pure water does not have electric conductivity. Thus, Electro-Magnetic flowmeters, which are ideal for general liquid flow measurement, cannot be used.
High requirement for clean-ness
Considering the fact that Pure/Ultra Pure water is mainly used for cleaning processes at semiconductor facilities, production / introduction of particles and metallic ions must be avoided at all costs.
Delivery examples and recommendations
Variable area flowmeters
They have a float in a tapering tube and it would be supposed that the float might produce particles. However, in actual operation, the float does not touch or rub against the tube and the number of particles getting into process liquid is therefore very limited.
However, Tokyo Keiso insists on taking no chances and we, therefore, produce and recommend Fluororesin-made flowmeters to solve the problem of possible metallic ions.
Recommended models :
| For minute flow | For medium flow | ||
 |
 |
 |
|
| P-771 | P-772 (With valve) |
AC-T | |
| All-Fluororesin Purgemeter | All-Fluororesin Clean Flowmeter | ||
Ultrasonic flowmeters
Ultrasonic flowmeters, which measure flow rate without any contact with process liquid, are ideal flowmeters for this application.
Recommended models :
| For small size lines | For medium to large size lines | ||
 |
 |
 |
|
| UCUF-04 | SFC-450 | UL330 | |
| All-Fluororesin UCUF | Clamp on type | ||
Vortex flowmeters
Vortex flowmeter with Fluororesin(PFA) material is available. No moving parts, compact design and affordable cost!
Recommended models :
 |
 |
|
| VF-3000 All-Fluororesin Vortex Flow Sensor |
VF-4000 All-Fluororesin Vortex flowmeter |
|
