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Flow Thermal mass flowmeter/ControllerHM5000

Thermal mass flowmeter/Controller HM5000

HM5000 PDF

*Specifications are subject to change without prior notice.

HM5000 is the thermal mass flowmeter for the measurement of gases. There are two types available: a) general-purpose type and b) high performance type. Depending on the application, either of these types can be selected. As for the flow range, it is from minimum 0 - 5mL/min(nor) to maximum 0 - 400L/min(nor).

Features

  • ·  Flow rate measurment in wide range

    Available for wide range from 0 to 5mL/min(nor) to 0 to 400 L/min (nor).

  • · High accuracy

    ±1%F.S. (High performance type)

  • · Miniaturization and improvement of reliability

  • · The following functions possible to add optionally.

    · Slow start function (Normal close type)
    · Output signal: 1 to 5VDC

Applications

  • · Utility gas supply lines in industries
  • · Various instruments for analysis
  • · Semiconductor gas supply lines
  • · Gas constant flow control and mixture control
  • · Embedded devices

Main specifications

Type STANDARD
Mass Flow meter
HM5122B、HM5123B
Mass Flow Controller
HM5172B、HM5182B
HM5173B 		HIGH PERFORMANCE TYPE
Mass Flow meter
HM5111B、HM5112B、HM5113B
Mass Flow Controller
HM5141B、HM5151B
HM5142B、HM5152B
HM5143B
Measuring medium Gases
Nominal diameter 1/4"、3/8"、1/2"
Flow range Max. 0 to 400L/min(nor)
Min. 0 to 30L/min(nor) 		Max. 0 to 400L/min(nor)
Min. 0 to 5mL/min(nor)
Fluid Temperature 5 to 45°C
Fluid Pressure 0.97MPa max.
Process Connection
 
Standard: SW (Option: VCR, VCO)
Accuracy ±2.0％ to ±4.0％F.S ±1.0％ to ±2.0％F.S