CLFC300 Series
*Specifications are subject to change without prior notice.
The CLFC300 series is flow controller which integrates all functions of an ultrasonic flowmeter, a control valve, and a circuit for flow computation and valve control. Its control function can quickly follow the target flow rate.
Thus, the CLFC300 is ideal for liquid control which is essential in semiconductor manufacturing for the constant supply of chemicals and flow control of DIW and slurry.
Flow measurement is stabilized by faster calculation and improved bubble resistance.
A quick step response is achieved by state-of-the-art signal processing technology. The CLFC300 tracks variations in the flow and returns it to the set point within 1.5 seconds.
A needle valve is available for chemical liquids and DIW, and a pinch tube valve for slurry liquids. The STA-PURE style pcs tube is added to the lineup of pinch tubes. This tube has excellent durability and does not need to be replaced regularly.
An ultrasonic flowmeter, a control valve, and a circuit are all contained in a single case. In addition, the layout was revised to make the controller more compact: it is now 20% smaller and 35% lighter.
No complicated piping or wiring is required: simply connect the fittings and multi-core cables to complete the installation.
Power consumption is reduced by 35%. All parts are comply with the RoHS requirements.
The CLFC uses highly-corrosion-resistant PFA and PTFE for wetted parts and ultra-durable PVDF for the case.
It is ideal for the semiconductor industry and other industries that use corrosive chemicals.
The controller conforms to EN 61326-1: 2006.
The CLFC300 ensures accurate and stable feed control of chemical liquids and DIW, which was conventionally conducted by metering pumps and static head tanks.
When CLFC300 are installed both in chemical liquids and pure water lines, they help directly dilute chemicals with pure water while controlling the concentration accurately and stably.
The CLFC300 on various slurry lines of CMP devices ensures stable and constant feed of slurry and saves valuable liquids.
| Measuring medium | Liquids (No bubbles contained for stable measurement) |
|---|---|
| Nominal diameter | Φ1/4 |
| Flow range | For slurry (pinch tube valve): 50 to 500 mL/min |
| For pure water and chemical liquids (needle valve): Max. 200 to 2000 mL/min Min. 5 to 50 mL/min |
|
| Fluid Temperature | 10 to 50°C |
| Fluid Pressure | 0.4 MPa max. |
| Process connection | Super300 pillar fitting Flare type fitting |
| Accuracy | ±0.2% F.S. |
FlowMeasurement
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