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FlowMeasurement
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LevelMeasurement
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Related Instruments
Guidance Download
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The UCUF-K series ultrasonic flowmeter is designed for measuring small flow rates of ultrapure water and chemical liquids. It is comprised of the UCUF-K detector and SFC converter. All wet parts of the detector are made of special-grade PFA molds for the semiconductor industry and have no moving parts or sealing mechanism such as O-rings which would accumulate liquid components. The simple and smooth construction leaves no residues and is ideal for processes such as semiconductor manufacturing which requires ultimate cleanliness.
For Detector
Measuring medium | Liquid (Without bubbles, and homogeneously mixed) |
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Nominal diameter | 4mm to 20mm |
Flow range | Max. 18.8 to 80 L/min(20K) Min. 0 to 0.8 L/min(04K) |
Fluid Temperature | +10 to +60°C |
Fluid Pressure | 0 to 0.5MPa(G) |
Process Connection | PFA tube end |
Accuracy | ±0.008 L/min to ±1% |
For Compatible Convertor
FlowMeasurement
LevelMeasurement
Related Instruments
Guidance Download
* Please scan the QR code with your smartphone to access this website page.