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FlowMeasurement
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The UCUF-02M/SFC-010L ultrasonic flowmeter is designed for measuring small flow rates of pure water, ultrapure water, and chemical liquids.
The size of the measuring section is φ2.5 mm,which allows the flowmeter to cover small flow rates which are difficult for other UCUF flowmeters to measure.
All wet parts are made of special-grade PFA molds for the semiconductor industry and have no moving parts or sealing mechanism which would accumulate liquid components.
The simple and smooth construction leaves no residues and is ideal for processes such as semiconductor manufacturing which requires ultimate cleanliness.
The inlet and outlet of the flowmeter are formed by standardized tubes, so the flowmeter can connect to various PFA fittings.
For Detector
Measuring medium | Liquids (those that do not contain air bubbles and permeate or corrode PFA) |
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Nominal diameter | 1/4" |
Flow range | Max. 0 to 100 mL/min Min. 0 to 10 mL/min Full scale setting in 10 mL/min steps |
Fluid Temperature | 10 to 90 °C |
Fluid Pressure | 0 to 0.5 Mpa |
Process Connection | PFA tube end |
Accuracy | ±1% RD (at a flow rate of 25 mL/min or more) ±0.25 mL/min (at a flow rate of up to 25 mL/min) For water of 20℃ |
For Compatible Convertor
Model | SFC-010L |
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Display | 4-digit LED, Instantaneous flow rate (mL/min) |
Output |
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Power supply | 24 V DC± 10% |
Construction | IP20 (indoor use) |
Installation | DIN rail installation |
FlowMeasurement
LevelMeasurement
Related Instruments
Guidance Download
* Please scan the QR code with your smartphone to access this website page.