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FlowMeasurement
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LevelMeasurement
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Related Instruments
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*Specifications are subject to change without prior notice.
Just like the popular P-810 model, the P-820 is also widely used in semiconductor production. Models with reed switch type alarm contact are available.
Flow measurement in semiconductor production equipment
Measuring medium |
Gases Liquid (Equivalent to water: Density 1.0g/cm³, Viscosity 1.0mPa·s) |
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Nominal diameter |
Rc: 1/4"(Standard), 1/8" NPT: 1/4", 1/8" SW: 1/4", 3/8" VCR: 1/4", 3/8" |
Flow range | Air
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Fluid temperature | Max. 120°C (Depends on the gasket material) |
Fluid pressure | 0.8 MPa max. |
Accuracy | P-821: ±5% F.S. P-823: ±3 F.S. |
FlowMeasurement
LevelMeasurement
Related Instruments
Guidance Download
* Please scan the QR code with your smartphone to access this website page.