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Flow PurgemeterP-771

Purgemeter P-771

P-771 PDF

-Advice for your product selection Catalog PDF

*Specifications are subject to change without prior notice.

The P-771 is an all-fluororesin, ultra-clean purgemeter. All parts from wetted parts to structural parts are made of non-metallic material. In particular, the wetted parts and tapered tube are PFA integral mold, preventing the purgemeter from rusting even in the atmosphere. Tube end connection is available. The P-771 is ideal for the pure/ultra-pure water process and chemical injection process in semiconductor production facilities.

Major Applications

Pure/ultra - pure water lines and chemical injection lines in the semiconductor production process

Standard Specifications

Measuring medium Liquids
Nominal diameter Tube end: Φ6.35×t1(Standard), Φ6×t1, Φ8×t1
Piller fitting(Super 300 type): Φ6×t1 Tube connection, Φ8×t1 Tube connection Rc: 1/8"
Flow range
Water: 
Max. 0.2 to 2 L/min
Min. 3 to 15mL/min
·When selecting a range, refer to "Index& Quick Reference for P Series Purgemeters" (TGS0001).
·When selecting a flow range,refer to the standard flow rate table.
Fluid temperature Max. 60°C
Fluid pressure 0.5 MPa max.
Process Connection Tube end, Piller fitting, Rc
Accuracy ±5% F.S.